Rigaku MFM65S2RFFFLFL, Инструкция по эксплуатации

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ME12058B
Operation Section
Troubles Causes and remedies
The equipment does not
generate X-rays.
Check to make sure that the water chiller is turned on.
If the software screen shows a CW alarm, cooling water may
not be supplied to the X-ray tube.
Turn on the water chiller, and check that cooling water is
circulated properly.
Check to make sure that the side doors of the main module or
EFEM are not open. (See “2.3 Interlock List”.)
Check to make sure that the load port panels or rear panels
are not open.
Opening any of these panels or doors turns off the power of
the sample feed system. Be sure to close the side door and
panels.
Check to make sure that the software screen does not shows a
CW alarm even though the water chiller is operating and
circulating cooling water.
For the CW alarm, adjust the flow rate so that the alarms are
cancelled.
Check to make sure that the software screen does not show an
FCL alarm.
Shut down the PC, turn off the main breaker lockout handle
of the equipment, and restart the equipment.
(Refer to “2.4 Lock-out/Tag-out”.)
If this alarm is generated again, the filament in the X-ray tube
may be disconnected.
If the software screen shows another alarm or if the cause of
the problem is unknown, shut down the PC, turn off the main
breaker lockout handle of the equipment, then restart the
equipment. (Refer to “2.4 Lock-out/Tag-out”.)
CAUTION When the X-ray tube is replaced, contact
our service personnel in charge.
Don’t touch the X-ray tube.
NOTE:
When adjusting the flow rate,
contact the maintenance personnel.