Rigaku MFM65S2RFFFLFL, Инструкция по эксплуатации

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ME12058B
Operation Section
(2) Functions of the Edit buttons.
Names Functions
Multi Slot
Sync Slot
Add
Creates a new measurement condition and adds it to the end of the list.
Modify
Changes the content of the selected (blue) Process Recipe.
Copy
Copies the selected (blue) job and adds it to the next line.
Delete
Deletes the selected (blue) job.
Delete All
Deletes all selected (blue) job.
Up
Changes the order of the selected (blue) job in the job list.
Down
Changes the order of the selected (blue) job in the job list.
Close
Start Job
Executes the process recipe
Open
Save
Creates a new job name and adds it to the end of the list.
(3) Specify the wafer name and the measurement recipe. Click on [OK] to add the measurement
condition at the end of the list.
Items Contents
#
Order of the Job list (cannot be edited)
Port
Load Port number
Slot
Number of the slot holding a wafer.
Set the slot numbers between 1-25 from the bottom.
Process
Recipe
Select the Process Recipe
Wafer ID
Name of the wafer. Used in the head of the name of the measurement
result file.
Status
[PJ][Trans]
The measurement result file is automatically created and named as follows.
WaferID – yymmdd – hhmmss – MappingNo.
WaferID
: The above Wafer ID.
yymmdd : 6 characters of year, month and day. (E.g. 030101 ; 2003.01.01)
hhmmss : 6 characters of hour, minite and second. (E.g. 010100 ; 01:01.00)
MappingNo. : 3 characters of the mapping order in a wafer. (From 001)
The result file is saved in the data directory specified by each login user.
NOTE :
When changing the data directory, contact the maintenance personnel or the
administrator account user, because
[Setup]
navigation button and
[User Admin.]
sub-navigation button must be used to change the data directory.
(4) Specify all jobs for each wafer by using the Edit buttons.