Rigaku MFM65S2RFFFLFL, Инструкция по эксплуатации

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ME12058B
Operation Section
4.5 Equipment Diagnosis
Beam Diagnosis
Check the position of the X-ray output beam and the intensity of direct X-rays.
Upon completion of beam diagnosis, a confirmation dialog box is displayed.
When complete message is displayed in the confirmation dialog box, click on
[OK]
to save the
current measurement values.
If NG message is displayed, refer to the below table.
Results Solutions
XRR intensity differs from the
previous value by more than
±
5%.
No action is required if the 2
θ
angle is 0.01 or
smaller.
XRR beam position (2
θ
angle) shifts
by more than 0.01 degree.
Measure the check sample. If the obtained film
thickness differs from the standard value, the
optic system will require alignment.
XRF intensity differs from the
previous value by more than 5%. Measure the check sample. If the obtained film
thickness differs from the standard value, the
calibration curve will require standardization.
XRF beam position (2
θ
angle) shifts
by more than 0.01 degree.
Measure the check sample. If the obtained film
thickness differs from the standard value, the
calibration curve or optic system will require
standardization or alignment, respectively.
Fig. 4-5-1 Navigation Button
Fig. 4-5-2 Beam Diagnosis Dialog