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ME12058B
Operation Section
2.6 Maintenance Keys
The MFM65 system has many interlock functions for safety. When the enclosure covers of the
equipment are opened, electric power is OFF immediately. The X-ray generations are turned off, and
the mechanical systems, for example the goniometer, the robot, and so on, are turned off. But, some
items for maintenance need to be powered on with the covers open. In this case, maintenance keys are
used to release the interlock functions.
WARNING:
There are two kinds of maintenance keys in the MFM65 system.
One is the key for mechanical maintenance. This key must be in safe keeping with
the maintenance personnel in charge, and only maintenance/service personnel can
use these keys for maintenance only.
Another is the key for X-ray maintenance. This key must be in safe keeping with
the service personnel in charge, and only the service personnel can use these keys
for maintenance only.
It is strictly prohibited to use these keys other than for maintenance operations.
If these keys are used, mechanical hazards, electric hazards and X-ray hazards
occur inside the main module or the EFEM.
[ Inside locations of the maintenance key switches ]
Mechanical key switch
for the goniometer
X-ray key switch
Mechanical key switch
for the goniometer
Mechanical key switch
for the transfer robot
Right View
Fig. 2-6-1 Maintenance Key Locations
Left View
Содержание MFM65S2RFFFLFL
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