Rigaku MFM65S2RFFFLFL, Инструкция по эксплуатации, Страница: 14 / 102

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9
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ME12058B
Operation Section
[Interlock location]
NOTE : The measurement software
displays the messages
during interlock operation.
Interlock Name
1
Upper Door at Power
Box
2 EMO
3
Electric protection panel
in the lower right of
EFEM
4
Electric protection panel
at the Power distribution
Box
5
Electric protection panel
at the Motor driver Box
6
Electric protection panel
at the Pattern NAVI Box
7
Electric protection panel
at the X-ray power
supply
8
Electric protection panel
in the lower of
Power Box
9 Water leak sensor
10
Rear side Door of
Main module
11
Right side Door of
EFEM
Right side Door of
EFEM
(Gate and Cover at
wafer aligner closed)
12 Left side Door of EFEM
Left side Door of EFEM
(Gate and Cover at
wafer aligner closed)
13
Right side Door of
Main module
Right side Door of
Main module
(Gate and Cover at
wafer aligner closed)
14
Left side Door of
Main module
Left side Door of
Main module
(Gate and Cover at
wafer aligner closed)
15
Gate Sensor
(The robot arm comes in
contact with gate)
16
Load Port
(Removed)
9 : The sensor line is in the main module.
2
16
Fig. 2-3-1 Interlock Locations
1
2
8
7
9
10
15
Rear View
Right View
Left View
Front View
14
6
2
12
4
3
2
5
11
13