Olympus AL120-12 Series, Руководство по обслуживанию, Страница: 57 / 68

Maintenance Manual Test Programs
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[M1] Set the loader operation <Loader settings>
This program can be used for detailed loader settings.
Setting items are displayed on the liquid crystal panel.
Change the settings using the 4-way button.
Use the menu buttons on the liquid crystal panel for registration, cancellation, and page feed.
[M1]: Register <Save>
[M2]: Cancel <Cancel>
[M3]: Next page <PageUp>
[M4]: Previous page <PageDn>
Setting items ................................................... ........................... [ Default ]
Number of rotations for notch alignment
<Rotation of notcht>.................................................................... 1st rotation [1] / 2nd rotation [2]
Vacuum absorption before raising the A-arm in the cassette
<Vacuum contact before A arm >............................................. OFF [OFF] / ON [ON]
Use of multiple types of wafers
<Wafer size>............................................................................. Multiple [Multi] / Single [single]
Setting of sequence when power is turned on Top Macro
<Top macro button>.................................................................... ON [ON] / OFF [OFF]
Setting of sequence when power is turned on Back Macro
<Back macro button> ................................................................. ON [ON] / OFF [OFF]
Setting of sequence when power is turned on 2nd Back Macro
<2nd back macro button> ........................................................... ON [ON] / OFF [OFF]
Setting of sequence when power is turned on Microscope
<Microscope button> .................................................................. ON [ON] / OFF [OFF]
Setting of slot with which wafer transfer begins in a cassette
<Start slot> ................................................................................. Bottom [Bottom] / Top [Top ]
Numbering of wafers in a cassette
<No. on wafers in cassette> ....................................................... From bottom 1 [Bottom] / From top 1
[Top]
Registration of wafers unloaded during operation
<Register wafer unloading> ........................................................ ON [ON] / OFF [OFF]
Return to origin when power is turned on
<Initialize> .................................................................................. Automatic [Auto] / Standby [Manual]
Start activated by the stage sensor
<Stage set start> ........................................................................ ON [ON] / OFF [OFF]
Use of the vacuum stage
<Vacuum stage>....................................................................... Used [Used] / Not used [Not used]
Select the wafer type when the test is finished
＜
Wafer selection when ends
＞
.................................................. keep [Keep] / Release [Release]
Assign the window open/close sensor to the start switch
< Window set start> ..................................................................... OFF [OFF]] / ON [ON]
Buzzer at the end of the F-arm down movement
<A buzzer when F-arm is down>................................................. OFF [OFF]] / ON [ON
Source pressure sensor
<Main vacuum sensor>............................................................. Not used [Not used] / Used [Used]
・
Press the [M1]: Register <Save> button to register settings and terminate the setting operation.
Press [M2] button to quit without making corrections: Cancel <Cancel>
・
In the above described items, items for optional parts are included.
Some of the above described items may not be enabled, although they are selected and enabled,
depending on the specifications of your loader unit.