Olympus AL120-12 Series, Руководство по обслуживанию, Страница: 34 / 68

Test Programs Maintenance Manual
3-6
Page
Test No./
Test Name
Function Outline
[M4]
：
FOUP Clamp <FOUP Door latch movement check>
If the loader has not been initialized, initialization starts.
①
FOUP Clamp
②
FOUP Dock position
③
FOUP Door Clamp
④
FOUP Door Unclamp
The loader then repeats steps
③
to
④
.
・
Do not install the cassette.
・
Press the [Start] button to pause the operation at the break point, and press it again to continue the
operation.
・
When an error occurs, the loader displays the same error code as in the regular operation, and then
stops.
・
Press the [Quit] button, and the FOUP opener returns to its initial position and the loader stops the
operation.
[M2]
：
Door open, Wafer mapping, Z-axis (vertical) movement <Menu2>
This program can be used to check the operations of Door open, Wafer mapping and Z-axis (vertical)
movement.
[M1]
：
Door open <FOUP Door open close check>
[M2]
：
Wafer mapping <Wafer mapping sensor movement check>
[M3]
：
Z-axis (vertical) movement <Z axis movement check>
[M1]
：
Door open <FOUP Door open close check>
If the loader has not been initialized, initialization starts.
①
FOUP Clamp
②
FOUP Dock position
③
FOUP Door Clamp
④
FOUP Door open
⑤
FOUP Door close
The loader then repeats steps
④
to
⑤
.
・
Do not install the cassette.
・
Press the [Start] button to pause the operation at the break point, and press it again to continue the
operation.
・
When an error occurs, the loader displays the same error code as in the regular operation, and then
stops.
・
Press the [Quit] button, and the FOUP opener returns to its initial position and the loader stops the
operation.
[M2]
：
Wafer mapping <Wafer mapping sensor movement check>
If the loader has not been initialized, initialization starts.
①
FOUP Door open.
②
Press the interlock switch and the [Start] button.
③
Lowers the FOUP Door map start position.
④
Insert the map sensor.
⑤
Escape the map sensor.
The loader then repeats steps
④
to
⑤
.
・
Do not install the cassette.
・
Press the [Start] button to pause the operation at the break point, and press it again to continue the
operation.
・
When an error occurs, the loader displays the same error code as in the regular operation, and then
stops.
・
Press the [Quit] button, the loader stops the continuous operation. If you press the [Start] button
while pressing the interlock switch of the FOUP opener, the loader returns to its initial position and
stops the operation.