Olympus AL120-12 Series, Руководство по обслуживанию, Страница: 49 / 68

Maintenance Manual Test Programs
3-21
Page
[M2]
：
Check the origin in side-to-side direction <A-arm side-to-side>
If the loader has not been initialized, initialization starts.
①
Move the A-arm to the first wafer insertion height.
[M1]
：
Initialize
[M2]
：
Move to left side by 1 mm
[M3]
：
Move to right side by 1 mm
[M4]
：
Excitation ON/OFF
The sensor status is displayed on Wafer No.
[No.1]
：
Origin sensor detection ON:OFF
• Press the [Quit] button, and the loader executes initialization and stops the operation.
No. 14
Centering
transfer
position
check
<Centering adjustment>
This program can be used to check and adjust the centering position for each wafer diameter.
Press the [Start] button.
①
Insert the wafers into any slot of a cassette.
②
Using the 4-way button, select the number of wafer type to adjust or register from the list of wafer
type numbers displayed on the liquid crystal panel, and then press the [Start] button.
(Registration is done for each wafer diameter. Registration for each wafer thickness is not
available.)
③
Mapping is performed and the [Wafer No.] button for a slot in which there is a wafer blinks.
Press the [Wafer No.] button to specify the slot into which the wafer to be adjusted has been
inserted. The [Wafer No.] button for the selected slot stops blinking and stays lit.
④
Press the [Start] button .
⑤
The selected wafer is loaded from the cassette. After centering is performed, the wafer continues
spinning on the center table.
Note:
The voltage of the orientation flat sensor by every 90 degrees is displayed on the liquid crystal
panel and the wafer decentering status can be checked.
⑥
Using the 4-way button, correct the centering position. The correction value can be set in 0.06 mm
intervals.
Stop the center table rotation before making corrections.
[Start]: Pause the rotation
4-way button [UP] : Far side <Far>
4-way button [DOWN] : Near side <Near>
4-way button [LEFT] : Left <LEFT>
4-way button [RIGHT] : Right <RIGHT>
⑦
Register the correction value.
[M1]: Register <Save>
The registered correction data is saved in the internal memory.
After the data is put in the internal memory, the notched is adjusted, the wafer is loaded into the
cassette, and you are brought back to the step

.
• Display and registration are effective when the center table rotation is stopped.
• When the [Quit] button is pressed, the notched is adjusted and the wafer is loaded into the cassette.
The notched must be at the 45-degree position toward the front.
• If you do not press [M1] button but press the [Quit] button instead, the wafer is unloaded into the
cassette without saving the data.
•
[M4]
：
Excitation ON/OFF