Olympus AL120-12 Series, Руководство по обслуживанию, Страница: 44 / 68

Test Programs Maintenance Manual
3-16
Page
[M3]: Manual input of mapping parameters <Input parameter>
This program can be used to modify mapping parameters.
Using the 4-way button, select the number of the wafer type to modify from the list of wafer type
numbers displayed on the liquid crystal panel, and then press the [Start] button.
①
 Parameter setting items are displayed on the liquid crystal panel.
Select the parameter to change with the 4-way button.
[M1]: Switching between mapping sensors 1, 2, and 3
[M2]: Save <Save>
[M3]: Delete<Back space>
[M4]: Terminate display <Exit>
[No.1 to No.9]: Input numbers 1 to 9. [No.10]: Input 0.
[No.21]: Input -. (To be used only for the offset start position)
4-way buttons [RIGHT] and [LEFT]: Move the cursor.
4-way buttons [UP] and [DOWN]: Move from one item to another.
Settable parameters
Item...................................................Set value ...............Default
・
 Number of cassette slots
<Slot>................................................:25/26 ....................25
・
 Slot pitch
<Pitch>..............................................:6350/10000 ..........10000
・
 Upper limit of wafer position error
<Upper> ..........................................:10 to 3000 .............1500
・
 Lower limit of wafer position error
<Lower> ..........................................:10 to 3000 .............1500
・
 Upper-limit value of wafer thickness
<Thick Upper>...................................:90 to 5000 ...........1250
・
 Lower-limit value of wafer thickness
<Thick Lower>...................................:90 to 400 .............250
・
 Start position
<Start Position>................................................................36500
②
 Select an item using the 4-way buttons and input a value using the wafer No. buttons.
③
 To register the modified values, press [M2]: Save <Save>.
To terminate the program without modification, press [M4]: Terminate display <Exit>.
[M4]
：
Origin check <Origin sensor check >
①
This program is used to check the sensor detection status by moving the wafer sensor vertically.
[M1]
：
Initialize
[M2]
：
Excitation OFF
The origin sensor status is displayed in Wafer No.
[No.1]
：
Origin sensor detection ON:OFF

Press the [Quit] button, and the loader executes initialization and stops the operation.