Olympus AL120-12 Series, Руководство по обслуживанию, Страница: 56 / 68

Test Programs Maintenance Manual
3-28
Page
•
Transfer speed <Speed> SP1 to SP5
A-arm horizontal speed <A-arm linier speed> ..................... High speed <Fast> / Medium speed <Middle> / Low speed <Slow>
A-arm vertical speed <A-arm up down speed> ............... High speed <Fast> / Medium speed <Middle> / Low speed <Slow>
L-arm rotation speed <L-arm rotation speed>.................. High speed <Fast> / Medium speed <Middle> / Low speed <Slow>
L-arm vertical speed <L-arm up down speed> ................ High speed <Fast> / Medium speed <Middle> / Low speed <Slow>
Macro table rotation speed <Macro table rotation speed> ........ High speed <Fast> / Medium speed <Middle> / Low speed <Slow>
Macro table vertical speed <Macro table up down speed> ....... High speed <Fast> / Medium speed <Middle> / Low speed <Slow>
F-arm horizontal speed
<A-arm linier speed> ..................... High speed <Fast> / Medium speed <Middle> / Low speed <Slow>
F-arm vertical speed <F-arm up down speed> ................ High speed <Fast> / Medium speed <Middle> / Low speed <Slow>
No. 25
Wafer
unloading
position
adjustment
<Retracted position adjustment>
This program can be used to adjust the position where wafers are unloaded into the cassette to the
near side (cassette opening side).
This prevents unloaded wafers from hitting against the inside of the cassette.
①
Insert wafers into any slot of a cassette, and set the cassette.
②
Using the 4-way button, select the number of the wafer type to adjust from the list of wafer type
numbers displayed on the liquid crystal panel, and then press the [Start] button.
If the loader has not been initialized, initialization starts.
③
The mapping is executed and the [Wafer No.] button of the slot that contains the wafer blinks.
Use the [Wafer No.] button to specify the slot where the wafer to be adjusted is inserted.
The [Wafer No.] button of the selected slot stops blinking and turns ON.
④
Press the [Start] button to decide the wafer to be loaded. The correction value of the unloading
position is displayed on the liquid crystal panel.
⑤
Press the [M1] button to load the wafer.
⑥
The wafer is unloaded into the cassette.
⑦
If <Result>: OK is displayed, press the [M2] button to put the correction data into the internal
memory.
⑧
Press the [M1] button to repeat steps
③
and
⑤
.
・
 Press the [Quit] button to terminate the adjustment.
・
 Before starting the test, insert wafers into the cassette and push them in until they stop.
(If wafers are already inserted in the cassette, push them in until they stop.)
Position the cassette toward the front as much as possible by taking care that it is inside the range of
the cassette guide clearance.
・
 Correctable range: 0 to 5 mm
No. 26
Software
Version,
error log
display
and
operation
settings
<Condition setting and Error log disp>
This program can be used to set the loader operation, check the software version and set the time.
Select the item to adjust using the menu buttons on the liquid crystal panel.
[M1]
：
Set the loader operation <Loader settings>
[M2]
：
Check the error log and software version.<Version and error log display>