Olympus AL120-12 Series, Руководство по обслуживанию, Страница: 32 / 68

Test Programs Maintenance Manual
3-4
Page
Table 2-2: Test Functions
Test No./
Test Name
Function Outline
No.1
Wafer
mapping
sensor
movement
check
( AL120-LMB
12-F )
<Wafer mapping sensor movement check>
This program can be used to check and adjust the height of the wafer sensor.
Press the [Start] button.
Select the item to adjust using the menu buttons on the liquid crystal panel.
[M1]
：
Vertical movement <Vertical movement check>
[M2]
：
Horizontal movement <Horizontal movement check>
Do not continue the operation for longer than 5 minutes.
Wait for longer than one minute before restarting the operation.
[M1]
：
Vertical movement
If the loader has not been initialized, initialization starts.
①
Raises the wafer sensor to the cassette insertion height
②
Lower limit
③
Mapping end position
④
Lower limit
The loader then repeats steps
①
to
④
.
・
Press the [Start] button to pause the operation at the break point, and press it again to continue the
operation.
・
When an error occurs, the loader displays the same error code as in the regular operation, and then
stops.
・
Press the [Quit] button, and the wafer sensor returns to its initial position and the loader stops the
operation.
[M2] : Horizontal movement
If the loader has not been initialized, initialization starts
①
Raises the wafer sensor to the cassette insertion height.
②
Cassette insertion position
③
Cassette
escape position.
The loader then repeats steps
②
to
③
.
・
Press the [Start] button to pause the operation at the break point, and press it again to continue the
operation.
・
When an error occurs, the loader displays the same error code as in the regular operation, and then
stops.
・
Press the [Quit] button, and the wafer sensor returns to its initial position and the loader stops the
operation.
No.1
FOUP-OPE
NER
movement
check
( AL120-LMB
12-LP3)
<FOUP Opener movement check>
This program can be used to check and adjust the height of the wafer sensor.
Select the item to adjust using the menu buttons on the liquid crystal panel.
[M1]
：
FOUP Clamp, Dock, Door vacuum, Door Clamp <Menu1>
[M2]
：
Door open, Wafer mapping, Z-axis (vertical) movement <Menu2>
・
Do not install the cassette except for Door vacuum.
・
Do not install the adapter for 8-inch cassette. (The error occurs.)
It becomes an error by overheating when continuously operating.
Continuous operation must be limited to 5 times or less in order to
protect the motor from damage .
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