Olympus AL120-12 Series, Руководство по обслуживанию, Страница: 25 / 68

Maintenance manual Adjustments
2-3 Page
4) Checking the wafer mapping parameters
Check the wafer mapping parameters setting state using Test 12.
①
From the submenu on the liquid crystal panel,
execute [M2] <Mapping result display>.
Press the [M2] button <Disp>.
②
The list of wafer types currently registered are displayed on the liquid
crystal panel.
Using the 4-way button, move the <x> to the item to add, then press the
[M1] button <Ok>.
③
Insert wafers to be registered into all slots of the cassette, and set the
cassette in the cassette table.
④
Press the [M1] button <Mapping>.
The mapping operation starts.
⑤
Press the [M2], [M3] and [M4] buttons to show the results on the liquid
crystal panel.
[M1]: Executes mapping <Mapping>
[M2]: Displays the results of mapping senso <Display result sensor>
Make sure that all the slots for each sensor have indication of OK.
If there are any wafers with an “NG” indication, the wafer deflection value
or the cassette pitch will vary widely.
Using Test 11 [M3]: Manual input of mapping parameters <Input
parameters>, make a fine adjustment of the detection range.
* Refer to Section 4 Test Mode for detailed procedures.
M1:Mapping
M2:Display result sensor1
Mapping Sensor1
Mapping sensor 1
No | |P |thick| No| |P |thick
1|OK| 48500| 1500| 6|- | 0| 0|
2|- | 0| 0| 7|- | 0| 0|
3|- | 0| 0| 8|- | 0| 0|
4|- | 0| 0| 9|- | 0| 0|
5|- | 0| 0| 10|- | 0| 0|
PageUp PageDn Exit
No |Size |Thick |Speed |comment
x1 | 300 |775-500 |High |
2 | 300 |775-500 |High |
3 | 300 |775-500 |High |
4 | 300 |775-500 |High |
5 | 300 |775-500 |High |
6 | 300 |775-500 |High |
OK Cancel PageUp PageDn
M1:Mapping auto adjust
M2:Mapping result display
M3:Input parameter
Auto Disp Manual