Olympus AL120-12 Series, Руководство по обслуживанию, Страница: 5 / 68

Operation/Maintenance Manual
Introduction/
Safety Precautions
i-3 Page
or the buffer tank is not provided with this product. If you need them, contact
Olympus.
11. Be careful, if you transfer the wafer in the down-flow status that may allow the wafer
to sway, the risk may be caused in transferring the wafer.
12. Be sure to use the cassette complied with SEMI standards. Using the distorted
cassette may cause the risk of damaging the wafer, etc.
13. To allow each microscope manifest its full performance, reserve an installation space
having the minimum dimensions described below before assembly and installation
of the microscope.
*The dimensions of the area enclosed in alternate long and two short dashes lines
indicate the stage movement range.*When maintenance is required, a larger work
space can be prepared by changing the observation tube orientation or moving
the stage.
*The following installation space is set according to the SEMI standard guidelines
(SEMI S8-1016).It is recommended that you set the optimum installation space
for each customer by referring to the following installation space data as well as
the appearance of the system, eye point height, etc.
14. FOUP opener is equipped with a power shut-off switch, located near the top edge of
the open door.
This switch is mechanically coupled with the window opening/closing system.
The switch is exposed on the upper position of the door while the window is open
,and stored in a position where it does not touch the door while the window is closed.
If the door of the FOUP opener closes while the window is open, the switch is turned off
and the power of the FOUP opener is shut off.This system prevents injuries from getting
hands caught in the door.