Olympus AL120-12 Series, Руководство по обслуживанию, Страница: 47 / 68

Maintenance Manual Test Programs
3-19
Page
No. 12
A-arm
insertion
height check
and vertical
movement
check
<A-arm insertion height check>
This program can be used to check and adjust the A-arm insertion height.
Press the [Start] button.
Select the item to adjust using the menu buttons on the liquid crystal panel.
[M1]
：
Check the empty arm insertion height and the vacuum fine-adjustment value <A-arm insertion
height adjustment>
[M2]
：
Check the upper and lower limit positions <M2:Upper/Lower limit position check>
[M1]
：
Check the empty arm insertion height and the vacuum fine-adjustment value <A-arm
insertion height adjustment>
①
Insert the wafer to set into the cassette slot. (Initially, insert the wafer into the 12th, 13th or 14th
slot from the bottom.)
②
Place the cassette on the cassette installation part.
③
Using the 4-way buttons, select the Wafer Type No. to be adjusted or registered from Wafer Type
No. List displayed on the liquid crystal panel. Then, press the [Start] button.
If the loader has not been initialized, initialization starts.
The mapping is executed.
④
Using the Wafer No. selector button, specify the slot to which the wafer for adjustment was inserted.
(Initially, specify 13.)
⑤
Press the [Start] button.
⑥
The A-arm moves up and the horizontal excitation turns OFF.
⑦
Manually insert the A-arm into the cassette.
You can select an operation from the menu buttons on the liquid crystal panel to then confirm or adjust
the settings.
[M1]: Turn the vacuum ON for the A-arm <Vacuum ON OFF>
[M2]
：
Move the height of the cassette installation part to the removal height or the arm insertion height
alternately. <Put a wafer on a A-arm>
[M3]: Register <Save>
[M4]: Specify a different slot <Change slot>
⑧
Confirm the arm insertion height or make fine adjustments. A-arm movement can be selected by
using the 4-way button on the liquid crystal panel.
[UP]: Raise the A-arm slightly <UP: A-arm 0.1 mm UP>
[DOWN]: Lower the A-arm slightly <DOWN: A-arm 0.1 mm DOWN>
⑨
Register the adjusted value.
[M3]: Register <Save>
⑩
Confirm the wafer removal height or make fine adjustments.
Move the A-arm using the menu button on the liquid crystal panel.
Press the [M1] button to turn ON the A-arm vacuum. <Vacuum>
Press the [M2] button <Put a wafer on a A-arm> to move the A-arm to the wafer insertion height.
The A-arm movement can be selected using the 4-way buttons on the liquid crystal panel.
[UP]
：
Raises the A-arm finely < UP: A-arm 0.1mm UP >
[DOWN]
：
Lowers the A-arm finely < DOWN: A-arm 0.1mm DOWN >
⑪
Register the adjusted value.
[M3]: Register <Save>
⑫
When a wafer is chucked by the vacuum, press the [M1] button to turn the vacuum OFF for the
A-arm.
⑬
Press the [M2] button <Put a wafer on A-arm> to raise the elevator to the A-arm insertion height.
・
When the [Quit] button is pressed, wafer removal height adjustments are finished and each part is
initialized
・
When the [M4] button is pressed, and you are brought back to
③
and can specify a different slot.
For the 2nd and 25th wafer, confirm by performing the steps
③
through
⑧
, and
⑩
and
⑫