Olympus AL120-12 Series, Руководство по обслуживанию, Страница: 52 / 68

Test Programs Maintenance Manual
3-24
Page
[M1]
：
Initialize
[M2]
：
Move all strokes horizontally
[M3]
：
Move the half stroke horizontally
[M4]
：
Excitation ON/OFF
The sensor status is displayed on Wafer No.
[No.1]
：
Detect the macro side sensor
[No.3]
：
Detect the horizontal middle point
[No.5]
：
Detect the stage side sensor
• Press the [Quit] button, and the loader executes initialization and stops the operation.
Do not continue the operation for longer than 5 minutes.
Wait for longer than one minute before restarting the operation.
No. 18
Vacuum
switch
check
<Vacuum switch check>
This program can be used to turn each vacuum electromagnetic valve ON/OFF and check the ON/OFF
state of the corresponding vacuum switch.
Press the [Start] button.
If the loader has not been initialized, initialization starts.
Select the electromagnetic valve to turn ON/OFF by using the Wafer No. selector buttons.
The arm height is changed each time the menu button on the liquid crystal panel is pressed.
Select a menu button ([M1] or [M2]) and press the [Start] button to being operation.
[M1]: Change the up/down position of the A-arm <A-arm change position>
[M2]: Change the L-arm position <L-arm change position>
[M3]
：
Change the F-arm position -arm
・
Showing the vacuum switch ON/OFF state <Switch display>
The ON/OFF state of the vacuum switch that corresponds to the selected electromagnetic valve is
indicated on the Wafer No. selector button.
When the vacuum switch is ON, the LED on the Wafer No. selector button lights up.
[No. 1]: A-arm <A> [No. 2]: Center table <M>
[No. 3]: L-arm <L> [No. 4]: F-arm #1 <F1>
[No. 5]: F-arm #2 <F2> [No. 6]: Stage <S>
Turning the electromagnetic valve ON/OFF <Valve switching>
When the selected electromagnetic valve is ON, the LED on the Wafer No. selector button lights up.
[No. 11]: A-arm <A> [No. 12]: Center table <M>
[No. 13]: L-arm <L> [No. 14]: F-arm #1 <F1>
[No. 15]: F-arm #2 <F2> [No. 16]: Stage <S>
Turning the vacuum switch buzzer ON/OFF <buzzer switching>
The buzzer keeps sounding as long as the LED on the Wafer No. selector button is lit and the vacuum
switch is ON.
[No. 21]: A-arm <A> [No. 22]: Center table <M>
[No. 23]: L-arm <L> [No. 24]: F-arm #1 <F1>
[No. 25]: F-arm #2 <F2> [No. 26]: Stage <S>
・
When the [Quit] button is pressed, the arms return to their initial positions and the loader stops the
operation.
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