Nikon NWL860 Series, Руководство пользователя

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Chapter 4 Communications Specification
4
Default ALID ALTX Default ALID ALTX
413 SECS undefined function *
Check the cable connection
414 SECS undefined data format *
Check the cable connection
415 SECS data too long *
Check the cable connection
416 SECS conversation timeout *
Check the cable connection
417 SECS unexpected primary msg *
Check the cable connection
418 SECS unexpected secondary msg *
Check the cable connection
419 SECS in/out line err *
Check the cable connection
420 Initialization cant be done *
Specify transfer
421 Wafr size incarrfil not corct *
Initialize carrier file
422 Unexpected wafer detected *
Remove wafer on change arm (stage)
423 Detected the carrier removed *
Do not select “Conti” if the carrier
has been replaced Select
424 Detected the carrier removed *
Do not select “End” if the carrier
has been replaced Select
425 Can’t unload the wafer *
Set the correct carrier
426 Remote box hardware err *
Turn off the power once and again
427 Remove box line err *
Check the cable connection
428 Initialization can’t be done *
Indicate the operation by the
function key on the display
429 Centering sensor is shaded *
Confirm the lighting state of
centering sensor
430 Height search err *
Check and see if the wafer is in the
lowermost pocket of the carrier
431 Pitch search err *
Check and see if the wafer is in the
uppermost pocket of the carrier
9XX < < < Indxr error > > >
900 Indxr error *
901 Indxr Internal error *
902 Indxr in/out line err *
903 Indxr send retry-limit over *
Check the cable connection
904 Indxr abort msg. receive error *
905 Indxr interference error *
906 Pod is not installed *
Install Pod
907 Load/Unload Position error *
Other Internal Err *
ALID Please push reset key
Message Variable
S5F1
S5F6
ALTX Alarm message text
Text indicating “error type” and the “action” shown
on the LCD if an error occurs. Each text
corresponds to an ALID. All text is in English (see
ALID above). NUL is used to start a new line.
Format: 20
(ASCII)
Constant Format
5-8. ALTX