Nikon NWL860 Series, Руководство пользователя

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Chapter 4 Communications Specification
4
Message Variable
S7F23
S7F26
CCODE Format: 52
(2-byte integer)
Constant Format
104 = Back Side Center Macro inspection time
Same as 102 above.
105 = Orientation flat/Notch alignment angle for
LOAD
PPARM Format: 32 (2-byte integer with sign)
0: (0°), 90: (90°), 180: (180°), 270: (270°)
106 = Orientation flat/Notch alignment angle for
accepted wafer storage Same as 105 above.
107 = Orientation flat/Notch alignment angle for
rejected wafer storage in Surface Macro
inspection
PPARM Format: 32 (2-byte integer with sign)
0: (0°), 45: (45°), 90: (90°), 135: (135°),
180: (180°), 225: (225°), 270: (270°), 315: (315°)
108 = Orientation flat/Notch alignment angle for
rejected wafer storage in Back Side Edge
Macro inspection Same as 107 above.
109 = Orientation flat/Notch alignment angle for
rejected wafer storage in Back Side Center
Macro inspection Same as 107 above.
110 = Orientation flat/Notch alignment angle for
rejected wafer storage in microscopic
inspection Same as 107 above.
111 = Rotational rate (VR-dependent/independent)
PPARM Format: 52 (2-byte integer)
MSB of Upper Byte = 1: Set independent of
equipment VR setting
(The value of the PPARM lower byte is used.)
MSB of Upper Byte = 0: The equipment VR
setting is used.
(The value of the PPARM lower byte is
ignored.)
Relation between lower byte and rate
00H: (Stop)–FFH: (Maximum rate)
112 = Surface Macro X-axis tilt (VR-dependent/
independent)
PPARM Format: 52 (2-byte integer)
MSB of Upper Byte = 1: Set independent of
equipment VR setting
(The value of the PPARM lower byte is used.)
MSB of Upper Byte = 0: The equipment VR
setting is used.
(The value of the PPARM lower byte is
ignored.)
Relation between lower byte and tilt
00H: (- maximum tilt)–FFH: (+ maximum tilt)
113 = Surface Macro Y-axis tilt (VR-dependent/
independent) Same as 112 above.
114 = Back Side Edge Macro tilt (VR-dependent/
independent) Same as 112 above.