Nikon NWL860 Series, Руководство пользователя

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Chapter 4 Communications Specification
4
Message Variable
S2F33 VID Format: 51
(1-byte integer)
Constant Format
Results are transmitted in order of wafer
number on orientation flat alignment,
Surface Macro, Back Side Edge Macro, and
Back Side Center Macro, in this order. Wafer
results are delimited from following wafer
results by a comma. (A comma is also used
to indicate the end of the result message.)
(Meaning of Character)
G: Accepted
N: Rejected
0–9: Reject type
U: Uninspected (the inspection is
terminated halfway)
,: Separate wafers.
_: The inspection item is not
selected.
(Example)
GGGGG,NGGGG,GGGGG,GGGGG,GGGGG,
GGGGG,GGGGG,GGGGG,GGGGG,GGGGG,
GGGGG,GGGGG,22GGG,GGGGG,GGGGG,
GGGGG,GGGGG,GGGGG,GGGGG,GGGGG,
GGGGG,GGUUU,UUUUU,UUUUU,UUUUU,
_ _ _ _ _,
In a 25-pocket carrier, wafer No. 2 is rejected
on Surface Macro inspection, and wafer No.
13 is rejected on Surface Macro and Back
Side Edge Macro, with reject type 2.
2 = Inspection result data for preceding pocket
(one wafer)
V Format: 20 (ASCII)
Wafer number, wafer judgement, Surface
Macro, Back Side Edge Macro, and Back Side
Center Macro results are transmitted, in this
order. The meaning of the characters is the
same as for VID = 1 above.
(Meaning of Character)
G: Accepted
N: Rejected
0–9: Reject type
U: Uninspected
_: The inspection item is not
selected.
(Example)
09NGN1U
Wafer No. 9 is accepted on Surface Macro,
rejected on Back Side Edge Macro, rejected
on Back Side Center Macro with reject type
1, uninspected on Micro, and rejected for
general wafer judgement.