Nikon NWL860 Series, Руководство пользователя

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Chapter 4 Communications Specification
4
Command code
Control unit used to express a process program
(sample/carrier file)
(The inspection items and settings are determined
by the PPRAM, described later.)
A process program is transmitted by order of
CCODE No.
[Sample File Defining CCODE]
When the process program to be transmitted is a
sample file, the entirety of the following CCODE for
sample file definition must be transmitted.
1 = Inspection item for Slot 1
PPARM Format: 10 (binary)
Bit 0: The wafer is selected when wafer
sampling is 1, and not selected
when 0.
When no inspection item is
selected, the equipment only
performs centering and orientation
flat alignment. When an inspection
item(s) is selected, if the wafer is
not selected, no inspection(s) is
performed on the wafer.
Bit 1: Surface Macro inspection
1: Selected 0: Not selected
Bit 2: Back Side Edge Macro inspection
1: Selected 0: Not selected
Bit 3: Back Side Center Macro
inspection
1: Selected 0: Not selected
Bit 4: Microscopic inspection
1: Selected 0: Not selected
Bit 5, 6, 7: Always set to 0.
(Example) Select Back Side Edge Macro and
microscopic inspections.
(MSB) (LSB)
0 0 0 1 0 1 0 1 B
2 = Inspection item for Slot 2 Same as 1 above.
↓
26 = Inspection item for Slot 26 Same as 1 above.
102 = Surface Macro inspection time
PPARM Format: 31 (1-byte integer with sign)
0–99 (0–99 seconds)
-1 (infinite)
103 = Back Side Edge Macro inspection time
Same as 102 above.
Message Variable
S7F23
S7F26
CCODE Format: 52
(2-byte integer)
Constant Format
5-9. CCODE