Nikon NWL860 Series, Руководство пользователя

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Chapter 4 Communications Specification
4
Message Variable
S2F41 RCMD Format: 20
(ASCII)
Constant Format
When the command is enabled, collection event
CEID = 0606 occurs.
<MACRO_NG>
Equivalent to pressing the Macro-NG key; enabled
only when a Macro inspection is underway.
● When the reject type is not specified, a list of
zero length follows MIC_NG.
● When the reject type is specified:
CPNAME = NG_TYPE
CPVAL Format: 20 (ASCII) one character
Content: 1–9
When the command is enabled, collection event
CEID = 0604 occurs.
<GETMAP>
Performs mapping and obtains MAP data; enabled
when equipment processing status is READY.
Command Parameter: Not Required
VID of Mapping Data to be obtained = 4
When the command is enabled, collection event
CEID = 0622 occurs.
<GET_H/P>
Measures height and pitch and obtains the height/
pitch data; enabled when equipment processing
status is READY.
Command Parameter: Not Required
VID of Height Data to be obtained = 50
VID of Pitch Data to be obtained = 51
When the command is enabled, collection event
CEID = 0632 occurs.
<EJECT_OK>
Sends notification to the NWL that the wafer has
been removed at wafer eject with the Microscope
Reject key.
Command Parameter: Not Required
When the command is enabled, collection event
CEID = 0624 occurs.
<INX_P_LK>
Locks the indexer pod.
Command Parameter: Not Required
When the command is enabled, collection event
CEID = 9002 or 9003 occurs.
<INX_P_ULK>
Unlocks the indexer pod.
Command Parameter: Not Required
When the command is enabled, collection event
CEID = 9004 or 9005 occurs.
<INX_PD_LK>
Locks the indexer pod door.
Command Parameter: Not Required
Collection event doesn’t occur.