Nikon NWL860 Series, Руководство пользователя

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Chapter 4 Communications Specification
4
Message Variable
S2F13
S2F15
S2F29
S2F30
ECID Format: 51
(1-byte integer)
Constant Format
Range: 1.35–2.10 (1.35–2.10 mm)
Precision: 0.01 mm Default = 2.10
007 = Elevator downward travel for wafer transfer
(8-inch wafer)
ECNAME = ELV_DN_8
ECV: Format 44 (4-byte floating point)
Range: 2.05–2.80 (2.05–2.80 mm)
Precision: 0.01 mm Default = 2.80
008 = Elevator offset
(instrumental error adjustment range)
ECNAME = OFFSET_ELV
ECV: Format 44 (4-byte floating point)
Range: -6.40–6.35 (-6.40–+6.35 mm)
Precision: 0.01 mm Default = 0.00
009 = Display language
ECNAME = SET_DISP_LANG
ECV: Format 51 (1-byte integer)
0 = Japanese
1 = English Default = 0
010 = Cassette eject error
(during elevator rises after inspection)
ECNAME = SET_WITHDRAW
ECV: Format 51 (1-byte integer)
0 = Error
1 = Non-error Default = 0
011 = Change arm speed
ECNAME = SET_CHG_SPEED
ECV: Format 51 (1-byte integer)
0 = Regular
1 = Slow Default = 0
012 = Slot sensor (6-inch)
ECNAME = SET_SLOT_SNS_6
ECV: Format 51 (1-byte integer)
0 = On
1 = Off Default = 0
013 = Slot sensor (8-inch)
ECNAME = SET_SLOT_SNS_8
ECV: Format 51 (1-byte integer)
0 = On
1 = Off Default = 0
021 = COM1 baud rate
ECNAME = SECS_BAUD
ECV: Format 51 (1-byte integer)
0 = 9600 baud
1 = 4800 baud
2 = 2400 baud
3 = 1200 baud
4 = 300 baud Default = 0