Nikon NWL860 Series, Руководство пользователя

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Thank you for purchasing a Nikon Product. Communications requirements for the Nikon Wafer Loader
NWL860 series are specified in this IFC Function (SECS Communications) Specifications. To ensure
correct usage, please read this manual before using.
● No part of this manual may be reproduced or transmitted in any form without the prior consent of
Nikon.
● This manual is subject to change in part or in full without prior notice.
● Every effort has been made to ensure the accuracy of this manual. If you find that parts of the manual
are unclear or in error, please contact your nearest Nikon representative.
● Please be sure to read the manuals for the NWL wafer loader, microscope, and other products used
with the wafer loader.
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Purpose
This specification described the requirements for serial communications between the model
NWL860TMB-SP or NWL860INX and the customer's computer. The specification has the following
purposes:
<Online Remote Control Mode>
All operations except those involving the stage and the joystick can be performed with external devices,
including PCs, after communications have been set up correctly.
<Online Local Control Mode>
During manual operation, information on sampling/inspection patterns, the carrier, wafer loader, and
inspection results can be accessed both by the host computer and by the wafer loader.
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Wafer Loader
● NWL860TMB-SP using interface communications (NWL3R-IFC)
● NWL860INX using interface communications (NWL3A-IFC)
(See “5. Hardware and Setting” in Chapter 1.)
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ROM
● NWL3R-IFC, Ver 2.30 or later
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NWL3A-IFC, Ver 2.30 or later
The IFC function is available only with the models shown above, using the indicated ROMs.