MKS 651D Series, Руководство пользователя, Страница: 94 / 162

Setup Messages Chapter Five: Remote RS-232 Operation
82
To check the sensor range of your unit, issue the request:
R 55 for the Low range sensor
R 33 for the High range sensor
The controller responds with the message [
E x value
], where x corresponds to either ‘H’ or
‘L’ for High or Low sensor range and value corresponds to a valid sensor range shown in Table
14, page 81.
An example response, if the Low range sensor has a range of 100 Torr, is:
EL 08
To change the Low range to 5 Torr, enter:
EL 05
To change the High range to 1000 Torr, enter:
EH 10