MKS 651D Series, Руководство пользователя, Страница: 93 / 162

Chapter Five: Remote RS-232 Operation Setup Messages
81
How To Set the Sensor Range
Note
Be sure that the sensor is connected to the 651 controller before changing
the sensor range.
The command [ E x value ] identifies the range of the sensor, in units, where x corresponds to
either ‘H’ or ‘L’ for the High or Low pressure sensor, and value corresponds to a valid sensor
range, as listed in Table 14.
The 651 controller is initially configured to work with a 10 and a 1000 Torr pressure sensor. If
your sensors cover different pressure ranges, use this command to identify the range of your
sensor.
Sensor Range Values
Value Sensor Range Value Sensor Range
00 0.1 Torr 10 1000 Torr
01 0.2 11 5000
02 0.5 12 10000
03 1 13 1.33 mBar
04 2 14 2.66
05 5 15 13.33
06 10 16 133.3
07 50 17 1333
08 100 (initial) 18 6666
09 500 19 13332
21 20 22 200
Table 14: Sensor Range Values
Note
1. Pressure readings are reported as a percentage (%) of full scale (FS),
where full scale is the sensor range shown in Table 14.
2. For example, if the actual pressure is 10 Torr for a 10 Torr FS unit,
the 651 controller reports a pressure value of 100 (for 100%). If the
pressure is 10 Torr for a 100 Torr FS unit, the 651 controller reports
a pressure value of 10 (for 10%).