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5. Ensure the proper polishing fixture has been installed and that
connectors have been properly seated. See section titled
“Polishing Fixture Installation”, for instructions.
6. Press the “Step Start” button to begin polishing.
7. When the step has completed, the screen will indicate Pad,
Lubricant, and Film Types to use, as well as Time, Speed, and
Pressure for the next step in the process. The operator should
use the indicated Pad, Film, and Lubrication for the next step in
the process.
8. F.C.I. is Film Change Interval. When enabled (see section titled
“System Config” for enable instructions), the numeric value to
the right is the programmed interval for this process step. The
F.C.I. count is the actual number of times the current step film
has been used The film usage will be highlighted in
BLUE
with “Film OK” until the F.C.I. count matches the F.C.I. limit. If
A™ is being used, time adjustment parameters will be
displayed in the time display box as well.
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