Fig. 9
step. Enter the number of seconds desired for the ramp down
between maximum speed and the stopping of the Platen. Select
“OK”.
3. Touch the “Pressure Ramp Dn” to access the keypad. This
feature will slowly ramp the pressure down at the end of the
process step. Enter the number of seconds desired for the ramp
down between maximum pressure and no pressure at the end of
the process step. Select “OK”.
4. Touch the “Polishing Fixture Weight” to access the keypad. Enter
the weight of the polishing fixture to be used during the Quantity
Adjust on the production screen. Reference section “Quantity
Adjustment” for additional information.
5. Touch the “Polish Recipe OpCode” to access the keypad. Enter the
operation code to be assigned to the polisher and recipe for use
with the DE DataLink® data collection system.
1. Select tab “B” (Fig. 9). The parameters under tab “B” are used to
communicate to the operator the Pad, Lubricant, Film, Step Notes,
Film Change Interval and A™.
2. Select the “Pad” drop DOWN arrow. Select the desired pad for
this step in the process.
3. Select the “Lubricant” drop DOWN arrow. Select the desired
lubricant for this step in the process.
4. Select the “Film” drop DOWN arrow. Select the desired film for
this step in the process.
29
