5. Select “Step Notes” box to access the key pad. The text box is
used to convey process information to the users. Enter in any
pertinent information as needed. Select “OK”.
Fig. 10
Tab “B”, Page 2:
1. Select “Film Change Interval” box to access the keypad. Enter the
numeric value for the number of cycles the film is used for that
polishing step. The APM-HDC-5400 will track the number of uses
of the film and send an alarm message when the film needs to be
reset. The maximum numeric input for the film change interval is
99. Select “OK”.
2. Use the A™ features for creating processes that vary
polishing time by film run. The user can set the cycles and time
parameters to define this varying time processes.
The parameters under tab “C” are used for Micro-G® processes. If
the Micro-G® electrical hardware is installed it will be accessible,
otherwise it will be grayed out. See the Micro-G® section at the end
of this manual for more information.
Select “New” or “Copy” in the “Step Definition” area to define the
next step. Repeat the above instructions for all steps in a process.
See “Copy” function below to begin a new step based on a
previously defined step within the same process up to 20 steps.
Testing During Process Setup: To test a process step while in
“Process Config” mode, select the step and select the “Step Start”
button. This allows you to run and test an individual step without
having to access the process under the “Production” tab.
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