3. In the lower section of the screen, refer to the Pad, Lubricant, and
Film boxes for pre-defined variables for this process. Place the
specified pad and film on the Platen. See section titled “Polishing
Pad and Film Placement”, for instructions on placing the pad and
film on Platen.
4. Pressing the
BLUE
“More Info” box in the lower right corner will
access a screen with more detail of the polishing process including
the ramping parameters Fig. 13B). Press the “Return To Prodution
Screen” button to toggle back to the “Production Data” screen.
Fig. 13A
Fig. 13B
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