Chapter 3
:
Replacing Components and Preventive Maintenance
126
SE500
ULTRA
Hardware Manual
6. Replace with a new forcer. Grease adequately to the top forcer surface interfacing to the stage
carrier with WD04 anti-corrosion oil.
7. Replace back and tighten the forcer with the screws removed in step 3. Tighten the screws
after applying adequate amount of threadlocking sealant.
8. Replace back the forcer, hall sensors connectors and cables.
9. Check the air gap between the hall sensor and the stator with a 1.4 mm spacer. The air gap
must be maintained at a 1.4 mm gap width. Contact CyberOptics for the part number of the
spacer.
X-axis Forcer and hall sensor
Y-axis Forcer and hall sensor
Forcer
air gap
Содержание SE500ULTRA
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Страница 163: ...CyberOptics Corporation 153 AC and DC Distribution Block Diagram AC and DC Distribution Block Diagram ...
Страница 184: ...Chapter 5 System Drawings 174 CyberOptics Corporation ...