CSZ EZT-570S, Руководство пользователя

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EZT-570S User Manual
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8.1 Service
The service counters provide service interval alerts and life total service numbers for chamber
components and systems. The service intervals are preset at the recommended period for system
performance and reliability; however, the values can be adjusted to meet user specific maintenance
intervals. When a component exceeds its service interval, a notification alarm can be generated.
This alert will notify the operator that service should be performed at the next available down period.
Figure 8-1 Service Monitors
To adjust a counter set point, select the desired item from the list by touching its description. The
current set point for the selection will be shown in the service limit field at the bottom of the screen.
Enter the new set point by touching the service limit field and press the ‘Done’ button on the numeric
keypad when finished.
To adjust the service interval counters, you must be viewing the elapsed service count.
See section 8.1.1 Service Options for information on viewing elapsed service and life totals.
When a service interval is exceeded, an alert can be set to illuminate the corresponding indicator on
the status Monitor screen. An audible alert can also be turned on to get the operator’s attention. In
order to clear the service alert, the elapsed service counter must be cleared.
In order to determine which service counter has been elapsed, scan the list of outputs and look for
the ‘Exceeded’ description. To clear the counter, select the output from the list and press the ‘Clear’
button. This will clear the counter so that it can begin totalizing for the next service interval.
The service monitor screen can be set to display the elapsed service interval or the life total for the
component based on the selection made on the Service Option screen. The alert method can also be
disabled if this feature is not desired.