Installation
Atmospheric Single-Arm Robot
Installation Procedure
User’s Manual
Brooks Automation
3-8
Revision 1
4.
Do not allow lifting device cables to contact or interfere with the robot arm
while hoisting.
5.
Remove the lift rings after the robot is bolted down.
6.
Re-install ¼-20 set screws and level the robot.
7.
Install the robot controller. Four mounting holes are provided. See the specific
controller dimensional drawing for details.
Attaching the Robot to the Frame
To properly install the robot, the host system must provide proper interface mount-
ing. Secure the robot using the mounting holes on the four corners of the bottom plate
of the robot. Use four 3/8-inch bolts and eight ¼-20 leveling screws.
You can use standard mounting hardware to attach the robot to a host system frame.
If you purchased your frame from Brooks Automation, all hardware, mounting, and
leveling brackets are included. If you provide your own frame, be sure to include lev-
eling brackets to level the robot.
The enclosure for the robot must be rigid enough to prevent any movement of the cas-
settes or other stations caused by the high acceleration loads.
Leveling the Robot
Level your system before teaching and prior to installing the end effector. For an end
effector to work correctly, the wafers must be parallel to the end effector surface. The
cassettes should be level to gravity, or slightly tilted back to prevent wafers from
“walking” out of the cassette because of vibration.
Figure 3-1: Lift Points for the Robot
ATM
ABM
Lift Points
3 x 1/4-20 thread
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