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Command Reference
Atmospheric Single-Arm Robot
Description
User’s Manual
Brooks Automation
8-2
Revision 1
Description
The Brooks Automation Atmospheric Single-Arm Robot provides a command set that
allows complete control of all product functions. These commands provide a broad
range of command options, including a number of sophisticated integrated command
sequences.
When axis parameters such as speed, acceleration, or current position are listed or
modified by software commands, the parameter values for the three axes are always
listed in the order T, R, Z.
To issue commands, define each station with a one-character name or letter. For
example, the robot might get a wafer for Station A and put it in a cassette named Sta-
tion B. Station names can be any upper or lower case letter. It is helpful to use a nam-
ing convention that suggests the function or location of the stations. For example, all
upper case station names (A to Z) might be cassettes and all lower case station names
(a to z) might be stands.
For a cassette station, you need to teach only the first wafer slot. The controller will
use the pitch for each station to determine the distance between slots in the cassette.
Software Control
The Equipe Smart Controller (ESC) contains the firmware on EPROMs. The macro,
coordinate, parameter, and optional pre-aligner files are stored on NVSRAM. Your
robot is delivered with the files stored in NVSRAM on the controller; backup files are
supplied on a diskette.
The software stored on the EPROMs contains the basic commands and logic for inter-
preting commands or macros sent from the Teach Pendant or EQT 32. A macro is a
set of commands that perform an operation on the system. The firmware interprets
and executes the macros. You can edit a macro, but you cannot change the firmware.
Macros
A macro can be written to home the robot, align a wafer, get a wafer from a station, or
put that wafer in a cassette. In addition to the macros that OEM Systems writes for
you, you can write macros using the Equipe macro language and commands. Refer to
the Software and Controller Manual for instructions on writing macros.
A macro can initiate robot movement to any station and cassette slot, because the
coordinates for stations are defined and stored in a file. A station is any location
defined by a coordinate, composed of theta, radial, and vertical vertices.
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