Atmospheric Single-Arm Robot
Operation
User’s Manual
Teaching the Scanner Mapping
Brooks Automation
Revision 1
6-13
12.
When the scan finishes, enter
RSS
. Verify that the results correctly reflect the
position of the wafers within the cassette.
13.
Enter
RSA
.
14.
Enter
SAV
.
Teaching the Scanner in Special Situations
There can be instances when you cannot use the previous method. If the preceding
instructions do not work for you and one of the following situations is true, use the
information on this page:
•
The cassette is mounted in a position such that the robot arm cannot
extend to a point where the sensor can touch the wafer.
•
The sensor cannot reach the first slot due to an obstacle.
If the sensor cannot touch the first wafer
, but can touch another wafer in a different
slot, calculate the offset using the following formula:
Z-axis Offset = 320 – [(Sn –1) * Pitch / 10]
Where:
Sn = Slot number used for teaching.
Pitch = Pitch of the cassette.
For example: If slot #3 is the lowest slot the sensor can reach and you are using 200
mm wafers, the equation is 320 – [3 – 1) *2500 / 10] = 180. In this case, edit parameter
file line 24 to read 1, 1750, 180.
If the sensor cannot reach any wafer,
but it does reach within 1.75” of a wafer, change
the offset value for the R-axis to zero. Follow the instructions in the preceding scan-
ning procedure with these changes:
•
Measure and move the sensor to the 1.75” focal distance from the wafers.
•
Slide out the wafer in slot #1 so you can move to the correct Z-axis position.
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