Introduction
Atmospheric Single-Arm Robot
Atmospheric Single-Arm Robot Overview
User’s Manual
Brooks Automation
1-6
Revision 1
Wafer Pre-Aligner
Wafer pre-aligners use high-resolution optical sensing (11.0 microns) to align
wafers of 3 in. to 12 in. (75 mm to 300 mm) without mechanical changes or
readjustments. Sensing capabilities automatically align to the major flat or
notch. Direct encoder feedback on the wafer chuck and a linear light source
provide optimum illumination of the charged couple device (CCD) sensor.
A wafer pre-aligner can have
three axes or only one axis. A
three-axis pre-aligner can
rotate the wafer (theta axis),
move the wafer along a
straight line (radial axis), and
raise or lower the wafer (z
axis). A one-axis pre-aligner
can rotate the wafer only in
the theta direction, requiring
the robot to assist in reaching
and retracting or raising and
lowering the wafer.
Linear Track
The Linear Track automati-
cally moves the robot laterally between multiple stations that are positioned
too far apart for a stationary robot. The Galil motion control boad controls the
track as a single axis.
Figure 1-4: Atmospheric Wafer Pre-Aligner
Figure 1-5: Robot Mounted to the Linear Track
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