Atmospheric Single-Arm Robot
Operation
User’s Manual
Teaching a Robot and Pre-Aligner
Brooks Automation
Revision 1
6-7
Teaching a Robot and Pre-Aligner
Use a Teach Pendant or EQT interface to teach the robot and pre-aligner stations.
General steps are given here for teaching an integrated system. For specific informa-
tion on how to use the Teach Pendant or the EQT interface for teaching, refer to the
Smart Controller Hardware and Software User’s Manual
.
You need your axis assignments and station names for teaching. In the following
example steps, it is assumed there are two stations: Station A is the pre-aligner station
and Station B is the cassette station.
For an integrated system, first align the wafer and teach the pre-aligner position. If
this step is not taken, the robot will try to put the aligned wafer in the same slot as it
was before the aligning. The taught positions do not change, but the position of the
wafer on the end-effector will be different.
1.
Access Teach mode.
2.
Place the wafer on the chuck of the pre-aligner.
3.
Turn on all servo motors.
4.
Align the wafer. To align the wafer with the Teach Pendant, press
CTRL+Y
. To
align the wafer in EQT, press the ALIGN button on the Teach window.
The pre-aligner aligns the wafer to the center of the chuck.
5.
Turn off the servo motors for the T and R axes.
6.
Manually orient the robot arm to the wafer while raising the Z axis with the Z-
axis control button. Manually adjust the R axis until the top of the end effector
is just touching the bottom of the wafer.
7.
Select the station name and save the position.
8.
With the aligned wafer on the pre-aligner, turn on the servo motors for the T
and R axes.
9.
Set the stroke and offset for the pre-aligner. Use the defaults, 80 and 35, and
then adjust the numbers.
10.
With the aligned wafer on the end-effector, turn off the servo motors for the T
and R axes.
11.
Manually orient the robot arm to the first slot in the cassette while raising or
lowering the Z axis with the Z-axis control button. Manually adjust the R axis
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