Introduction
Atmospheric Single-Arm Robot
Atmospheric Single-Arm Robot Overview
User’s Manual
Brooks Automation
1-2
Revision 1
Atmospheric Single-Arm Robot Overview
Brooks Automation robots are Class 1 cleanroom-compatible. Robot mechanics are
free of backlash, resulting in
3
σ
repeatability of
+25
microns. The low-inertia design
enables rapid motion without sensitivity loss in the closed-loop DC-servo system.
There are no motors above the mounting surface and the robots have only sealed
cleanroom motors, belts, and pulleys.
Brooks Automation robots handle wafers from 75 mm (3 in) to 300 mm (12 in) in size.
The robots vary in size. The smallest robots handle loads of up to five pounds, mov-
ing vertically about 7 in. Larger robots have heavier bodies and move vertically from
10 in to 17 in.
The arm link length determines the reach; arm links are available in lengths from 4.25
in (107.95 mm) to 14.75 in (374.65 mm). For an arm length of 4.25 in per link, the total
reach is 8.50 in plus end-effector length.
Flat Panel Display (FPD) robots are similar to the wafer-handling robots, but because
the substrate is larger, the body must be heavy-duty. For example, the FPD 700 series
of robots handle FPDs up to 700+ mm. An FPD-robot direct-drive axis on provides
high-torque characteristics and eliminates transmissions or reductions, resulting in a
true zero-backlash design. The electro-static discharge (ESD) tolerance is 21 kV.
Figure 1-1: Atmospheric Single-Arm Robots
Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
