Adjustments and Calibration
Atmospheric Single-Arm Robot
Atmospheric Single-Arm Robot Alignment
User’s Manual
Brooks Automation
7-4
Revision 1
4.
Ensure the system is at room temperature.
5.
Power up and initialize the Atmospheric Single-Arm Robot.
6.
Follow the alignment procedures provided in this section in the order pre-
sented. Note that this section provides a detailed overview of the alignment
process, which will reference the actual procedures as required.
Leveling the Atmospheric Single-Arm Robot
Adjustable feet are provided on the Atmospheric Single-Arm Robot. These
feet are used to support the product, to compensate for an uneven floor, and to
relieve the wheels. Refer to
Installation Procedure on page 3-6
for complete
installation information.
NOTE:
It should not be necessary to level the Atmospheric Single-Arm Robot
unless this is a new installation.
Adjusting the Vacuum Sensor
An SMC Series ZSE2-T1-15 vacuum sensor is installed in the lower arm link of the
robot. If you have two end effectors, you have two vacuum sensors.
The functioning range of this sensor is from 0 to –30 in. Hg (0 to 101592 Pa). The robot
vacuum sensor is set for detecting silicon wafers at –15 in. Hg (50796 Pa). If you use a
stronger or weaker vacuum supply, you can adjust the sensor as follows:
1.
Remove the cover to the lower arm link by unscrewing the screws that attach
the arm cover to the arm. The sensor has a yellow potentiometer with High (H)
and Low (L) marked above it. You will need a small screwdriver to turn the
potentiometer.
2.
Connect the vacuum line.
3.
Install the end effector.
4.
Open the vacuum valve using the EQT interface or by entering a command.
For a single end effector or the first end effector, enter:
OUTP 0,0
5.
Without a wafer on the end effector, turn the potentiometer counter-clockwise
until the red LED lights. Consider this position A.
Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
