BOC Edwards EO2K, Инструкция по эксплуатации

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EO2K, EO4K and EO6K Diffusion Pumps
PAGE
iii
Issue G iii Aug 06
ILLUSTRATIONS
Figure Page
1 Sectional view of the EO2K pump (water-cooled version) 4
2 Sectional view of the EO2K pump (air-cooled version) 5
3 Sectional view of the EO4K pump 6
4 Sectional view of the EO6K pump 7
5 EO2K pumping speed (l s
-1
) against pressure (mbar/Pa) 10
6 EO4K pumping speed (l s
-1
) against pressure (mbar/Pa) 10
7 EO6K pumping speed (l s
-1
) and throughput (mbar l s
-1
) against pressure (mbar/Pa) 11
8 EO2K dimensions (mm) 13
9 EO4K dimensions (mm) 13
10 EO6K dimensions (mm) 14
11 EO4K inlet connection options 22
12 Recommended electrical supply and control circuit 25
13 Heater electrical supply connections 25
14 Cooling-water connections 27
15 Typical pumping system configuration 35
16 Fluid drain plugs 39
TABLES
Table Page
1 Operating and storage conditions 9
2 Performance data 9
3 Mechanical data 12
4 Pump fluid data 12
5 Cooling-water data 12
6 Cooling-air data (air-cooled EO2K only) 15
7 Electrical data 15
8 Materials of construction 15
9 Item Numbers 15
10 Checklist of items: EO2K fitting-pack 18
11 Checklist of items: EO4K fitting-pack 18
12 Checklist of items: EO6K fitting-pack 18
13 Vapour pump fluid thermal breakdown 29
14 Maintenance plan 38
15 Fault finding 44
16 Spare pump fluids and anti-seize compound 49
17 EO2K pump spares 50
18 EO4K pump spares 50
19 EO6K pump spares 50
20 EO2K pump accessories 51
21 EO4K pump accessories 51
22 EO6K pump accessories 51