BOC Edwards EO2K, Инструкция по эксплуатации

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EO2K, EO4K and EO6K Diffusion Pumps
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Issue G 44 Aug 06
Symptom Check Actions
The ultimate pressure is poor. Is there a leak in the vacuum system,
virtual or real ? Locate and seal the leak.
Is the vacuum system dirty ? Clean the vacuum system.
Is the pump fluid contaminated ? Inspect the pump fluid. Clean and refill
the pump if necessary.
Is the heat input low or high ? Check the electrical supply voltage.
Check the heaters for correct power
rating, electrical continuity, burnt out
element and poor thermal contact.
Renew the heater if necessary.
Is the water-cooling inadequate ? Check the cooling-water pressure and
temperature and correct if necessary.
Check the cooling-water pipelines for
obstructions and back pressure, and
correct as necessary.
Is the air-cooling inadequate ? Check that the cooling-fan works.
Rectify any problem found.
Check that the air-flow to the cooling-
fan is not obstructed. Remove any
obstructions.
Check that the ambient temperature
of the air supply to the cooling-fan is
not too high.
Is your pressure gauge incorrectly
calibrated ? Check the pressure gauge and rectify
any problem found.
Is the backing pressure high ? Check for a leak in the backing pipeline
and for poor rotary pump
performance. Correct as necessary.
Check for thermal breakdown of the
pump fluid. Clean the pump and refill
with fluid as necessary.
Table 15 – Fault finding (Sheet 1 of 2)