BOC Edwards EO2K, Инструкция по эксплуатации

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EO2K, EO4K and EO6K Diffusion Pumps
PAGE
ii
Issue G ii Aug 06
Section Page
4 OPERATION 31
4.1 General safety 31
4.2 Check the electrical safety of the pump 32
4.2.1 Check the earth (ground) continuity 32
4.2.2 Check the insulation resistance of the heaters 32
4.3 Start-up 33
4.4 Readmission of air to your vacuum system 33
4.5 Re-evacuation of your vacuum system 34
4.6 Shut-down 34
4.6.1 Introduction 34
4.6.2 Shut down the EO pump 36
5 MAINTENANCE 37
5.1 Safety 37
5.2 Tools and equipment required 38
5.3 Maintenance plan 38
5.4 Check the pump fluid-level 39
5.5 Inspect the pump fluid condition 40
5.6 Clean the pump 40
5.6.1 Introduction 40
5.6.2 Dismantle the pump 40
5.6.3 Clean the pump components 41
5.6.4 Reassemble the pump 41
5.7 Clean the radiation shield 42
5.8 Replace the pump heater 42
5.8.1 Remove the old heater 42
5.8.2 Fit the new heater 43
5.9 Check the heater securing nut 43
5.10 Clean the cooling-coil 43
5.11 Fault finding 43
6 STORAGE AND DISPOSAL 47
6.1 Storage 47
6.2 Disposal 47
7 SERVICE, SPARES AND ACCESSORIES 49
7.1 Introduction 49
7.2 Service 49
7.3 Spares 49
7.4 Accessories 49
RETURN OF BOC EDWARDS EQUIPMENT