BOC Edwards EO2K, Инструкция по эксплуатации

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EO2K, EO4K and EO6K Diffusion Pumps
OP
ERATION
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33
Issue G 33 Aug 06
4.3 Start-up
Note: If you do not have an RCCB in your electrical supply circuit, you must check the insulation resistance of
the heater as described in Section 4.2.2 before you switch on the EO pump.
We recommend that you use the following procedure to start up the system when the pump and your
vacuum system are at atmospheric pressure:
1. Refer to Figure 15. Close the vacuum system isolation or baffle-valve (10) and the vacuum system
air-admittance valve (2). Close any other openings to atmospheric pressure.
2. On water-cooled pumps: switch on the cooling-water supply.
3. Switch on the backing-pump (8).
4. Open the backing-valve (5).
5. When the backing pressure falls to 0.5 mbar (50 Pa) or lower, switch on the electrical supply to
the EO pump heater. Initially, the backing pressure will increase due to the outgassing of the pump
fluid.
6. Leave the pump to warm-up for at least 60 minutes, so that it reaches its operating temperature.
7. When the backing pressure is below the critical backing pressure for the pump fluid being used (see
Table 4), close the backing-valve (5) and open the roughing-valve (4).
8. When the system pressure has fallen to 0.1 mbar (10 Pa) or below, start fine pumping:
• Close the roughing-valve (4)
• Open the backing-valve (5)
• Open the vacuum system isolation or baffle-valve (10).
4.4 Readmission of air to your vacuum system
1. Refer to Figure 15. Close the vacuum system isolation or baffle-valve (10), and the roughing-valve
(4).
2. Open the backing-valve (5).
3. Open the vacuum system air-admittance valve (2).
WARNING
If you have incorporated isolation valves in both the cooling-water supply and return
pipelines, ensure that both valves are open before you switch on the pump. If you do not,
water trapped in the cooling-coil may boil, the cooling-coil may fracture, and hot water
and steam which escapes from the cooling-coil may injure people.
WARNING
Do not admit air into the EO pump through any port until the pump has cooled to
ambient temperature. If you do, the pump fluid may ignite, or expansion of admitted air
can cause hot fluid to be ejected from the pump.