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EO2K, EO4K and EO6K Diffusion Pumps

OP

ERATION

PAGE

35

Issue G

35

Aug 06

Figure 15 – Typical pumping system configuration

1.

Vacuum system

2.

Vacuum system air-admittance valve

3.

High vacuum gauge head

4.

Roughing-valve

5.

Backing-valve

6.

Backing gauge head

7.

Backing-pump air admittance valve

8.

Backing-pump

9.

EO pump

10.

Vacuum system isolation-valve

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Содержание EO2K

Страница 1: ...B304 09 880 Issue G Original Instruction Manual EO2K EO4K and EO6K Diffusion Pumps ...

Страница 2: ...This page intentionally blank ...

Страница 3: ...m Numbers 15 3 INSTALLATION 17 3 1 Safety 17 3 2 Unpack and inspect 17 3 3 Locate the pump 19 3 3 1 General requirements 19 3 3 2 Installation on a vacuum system 19 3 3 3 Free standing installation 20 3 4 Vacuum connections 20 3 4 1 System design 20 3 4 2 Connect the pump inlet and outlet 21 3 5 Make the electrical connections 23 3 5 1 Introduction 23 3 5 2 Connect the heater electrical supply 24 ...

Страница 4: ...ools and equipment required 38 5 3 Maintenance plan 38 5 4 Check the pump fluid level 39 5 5 Inspect the pump fluid condition 40 5 6 Clean the pump 40 5 6 1 Introduction 40 5 6 2 Dismantle the pump 40 5 6 3 Clean the pump components 41 5 6 4 Reassemble the pump 41 5 7 Clean the radiation shield 42 5 8 Replace the pump heater 42 5 8 1 Remove the old heater 42 5 8 2 Fit the new heater 43 5 9 Check t...

Страница 5: ...ircuit 25 13 Heater electrical supply connections 25 14 Cooling water connections 27 15 Typical pumping system configuration 35 16 Fluid drain plugs 39 TABLES Table Page 1 Operating and storage conditions 9 2 Performance data 9 3 Mechanical data 12 4 Pump fluid data 12 5 Cooling water data 12 6 Cooling air data air cooled EO2K only 15 7 Electrical data 15 8 Materials of construction 15 9 Item Numb...

Страница 6: ...EO2K EO4K and EO6K Diffusion Pumps PAGE iv Issue G iv Aug 06 This page intentionally blank ...

Страница 7: ...rmation is highlighted as WARNING and CAUTION instructions you must obey these instructions The use of WARNINGS and CAUTIONS is defined below The units used throughout this manual conform to the SI international system of units of measurement The following warning symbols are on the pump Warning refer to accompanying documentation Warning risk of electric shock Warning hot surfaces WARNING Warning...

Страница 8: ...s from the heater are brought out to a terminal box at the bottom of the pump for ease of connection to your electrical supply 1 3 Principle of operation The arrows in Figures 1 to 4 show the flow of vapour through the pumps Pump fluid is heated in the boiler to produce a vapour which passes up through the interior of the jet assembly and emerges from the jets as high velocity vapour streams The v...

Страница 9: ...t the operation of the pump with high ambient humidity request a copy of our Application Note P400 50 000 from your supplier or BOC Edwards 1 6 Accessories A wide range of accessories is available for the EO pumps This range includes vacuum fittings valves and the following thermal snap switches Cooling fail thermal snap switch This accessory can be fitted to all of the water cooled EO pumps to pr...

Страница 10: ...6 Backing connection 7 Condenser baffles 8 Backing spout 9 Ejector jet 10 Heater terminal block 11 Terminal box 12 Heater electrical lead 13 Heater assembly securing nut 14 Heater 15 Radiation shield 16 Pump body 17 Cooling coil 18 Third stage jet 19 Interior jet assembly 20 Cooling fail thermal snap switch mounting plate 21 Second stage jet 22 First stage jet 23 Pump inlet flange 24 Co Seal Proce...

Страница 11: ...ssue G 5 Aug 06 Figure 2 Sectional view of the EO2K pump air cooled version 1 Pump body cooling jacket 2 Condenser cooling fins 3 Cooling fan chamber 4 Cooling fan electrical cable 5 Earth ground stud 6 Cooling fan Cooling air Process gases Pump fluid vapour ...

Страница 12: ...cking spout 9 Pump ready thermal snap switch mounting position 10 Ejector jet 11 Heater terminal block 12 Terminal box 13 Heater electrical lead 14 Heater assembly securing nut 15 Heater 16 Radiation shield 17 Pump body 18 Third stage jet 19 Cooling coil 20 Interior jet assembly 21 Cooling fail thermal snap switch mounting plate 22 Second stage jet 23 Adjuster screw 24 First stage jet 25 Pump inle...

Страница 13: ...Condenser baffles 8 Backing spout 9 Ejector jet 10 Heater terminal block 11 Terminal box 12 Heater electrical lead 13 Heater assembly securing nut 14 Heater 15 Radiation shield 16 Pump body 17 Third stage jet 18 Cooling coil 19 Interior jet assembly 20 Cooling fail thermal snap switch mounting plate 21 Second stage jet 22 First stage jet 23 Adjuster screw 24 Pump inlet flange 25 Trapped O ring Pro...

Страница 14: ...EO2K EO4K and EO6K Diffusion Pumps PAGE 8 Issue G 8 Aug 06 This page intentionally blank ...

Страница 15: ...x 10 5 Pa With DC705 fluid 5 x 10 7 mbar 5 x 10 5 Pa With Santovac 5 fluid 5 x 10 7 mbar 5 x 10 5 Pa With Edwards L9 fluid 5 x 10 7 mbar 5 x 10 5 Pa Minimum backing pump displacement For maximum throughput EO2K 5 m3 h 1 EO4K 6 6 m3 h 1 EO6K 12 m3 h 1 Recommended backing pumps EO2K RV5 RV3 Use an RV3 backing pump if maximum throughput is not required EO4K RV8 RV12 Use an RV12 backing pump for very ...

Страница 16: ...EO2K EO4K and EO6K Diffusion Pumps TECHNICAL DATA PAGE 10 Issue G 10 Aug 06 Figure 5 EO2K pumping speed l s 1 against pressure mbar Pa Figure 6 EO4K pumping speed l s 1 against pressure mbar Pa ...

Страница 17: ...EO2K EO4K and EO6K Diffusion Pumps TECHNICAL DATA PAGE 11 Issue G 11 Aug 06 Figure 7 EO6K pumping speed l s 1 and throughput mbar l s 1 against pressure mbar Pa ...

Страница 18: ...5 ml For improved pump stability use a fluid charge of 125 ml when you use Santovac 5 fluid 300 ml Critical backing pressure With DC702 fluid 0 9 mbar 90 Pa 1 3 mbar 130 Pa 0 9 mbar 90 Pa With DC704EU fluid 0 6 mbar 60 Pa 1 0 mbar 100 Pa 0 6 mbar 60 Pa With DC705 fluid 0 5 mbar 50 Pa 0 9 mbar 90 Pa 0 5 mbar 50 Pa With Santovac 5 fluid 0 4 mbar 40 Pa 0 8 mbar 80 Pa 0 4 mbar 40 Pa With Edwards L9 fl...

Страница 19: ...EO2K EO4K and EO6K Diffusion Pumps TECHNICAL DATA PAGE 13 Issue G 13 Aug 06 Figure 8 EO2K dimensions mm Figure 9 EO4K dimensions mm A Water cooled B Air cooled ...

Страница 20: ...EO2K EO4K and EO6K Diffusion Pumps TECHNICAL DATA PAGE 14 Issue G 14 Aug 06 Figure 10 EO6K dimensions mm ...

Страница 21: ...ses 0 85 kW 1 35 kW Recommended fuse ratings 110 125 V electrical supply 5 A 10 A 13 A 210 225 V electrical supply 3 A 5 A 10 A 230 250 V electrical supply 3 A 5 A 10 A Table 7 Electrical data Base EO2K EO4K Nickel plated mild steel EO6K Stainless steel Body Stainless steel Interior assembly Aluminium Centre tube Stainless steel Cooling coil Stainless steel Table 8 Materials of construction Pump 1...

Страница 22: ...EO2K EO4K and EO6K Diffusion Pumps PAGE 16 Issue G 16 Aug 06 This page intentionally blank ...

Страница 23: ...th nitrogen for 15 minutes before you start installation work 3 2 Unpack and inspect 1 Remove all packing materials and protective covers and check the pump If the pump is damaged notify your supplier and the carrier in writing within three days state the Item Number of the pump together with your order number and your supplier s invoice number Retain all packing materials for inspection Do not us...

Страница 24: ...ed pumps 12 Washers 5 16 inch BSF 6 Studs 6 Nuts norm 5 16 inch BSF Table 10 Checklist of items EO2K fitting pack Quantity Description Check 3 1 Seal pack 1 NW25 elbow 1 NW25 centring ring 1 NW25 clamp 1 NW25 O ring 2 Water connection couplings and ferrules Table 11 Checklist of items EO4K fitting pack Quantity Description Check 3 1 NW25 elbow 1 NW25 centring ring 1 NW25 clamp 1 NW25 O ring 2 Wate...

Страница 25: ...cuum system Note If you want to fill the pump with fluid through the inlet flange as described in Section 3 9 3 fill the pump before you install it on your vacuum system 1 Inspect the pump inlet the pump outlet and the O ring grooves on the pump and on your vacuum system refinish if necessary refer to Section 3 4 2 2 Place the inlet seal on the pump inlet The inlet seal is either a Co Seal or a tr...

Страница 26: ...to the critical backing pressure fluid will backstream into the vacuum system and thermal breakdown of the pump fluid may occur Note that if you have a suitable backing pressure gauge you may be able to use the gauge to provide the necessary pressure signal for the pressure interlock Connecting pipelines should be as short as possible and have the largest possible diameter Pipelines connected to t...

Страница 27: ...re clean and scratch free refinish these faces if necessary Use acetone or another suitable cleaning solution to clean the pump flanges before you connect the pump to your vacuum system Use the correct number and size of bolts or use the correct number of claw clamps or use the correct rotatable flange packs to connect the pump to your vacuum system To connect the pump inlet EO2K Use the Co Seal s...

Страница 28: ...s INSTALLATION PAGE 22 Issue G 22 Aug 06 Figure 11 EO4K inlet connection options A Connection with bolted rotatable flange B Connection with clamped flange 1 Co Seal 2 Retaining ring 3 Rotatable flange 4 Pump inlet flange 5 Claw clamp ...

Страница 29: ...or the total heater loading of the pump You must provide suitable cable restraint and strain relief for the electrical supply cable For additional electrical safety Incorporate fuses in your electrical supply The fuses must be suitably rated in accordance with the requirements in Table 7 We recommend that you use suitable conduit with a conduit fitting to connect the electrical supply If you do no...

Страница 30: ...hen the backing pump is switched on The fan remains on after the pump heater electrical supply has been switched off This will help to rapidly cool the pump and prevent excessive back streaming of pump fluid if the pump inlet isolation valve is left open 3 6 Fit optional thermal snap switches If you have ordered any thermal snap switch accessories fit them now On all applications we recommend that...

Страница 31: ...supply 2 RCCB 3 Fuse 4 Power relay RL1 5 Pump heaters 6 Relay coil RL1 7 Stop button 8 Start button 9 Relay latch contact RL1 10 Backing pressure interlock switch 11 Cooling fail thermal snap switch 12 Control electrical supply 1 Spare terminal 2 Heater terminal 3 Heater terminal 4 Cable gland 5 Earth ground connection 6 Radiation shield 7 Ceramic terminal block 8 Nickel heater wires 9 Terminal bo...

Страница 32: ...is at least 20 higher than this minimum flow rate High cooling water temperatures should not have any appreciable effect on pump performance except to increase the vapour pressure of the fluid which will limit the ultimate vacuum that can be obtained We recommend that the cooling water supply is filtered and that a flow indicator is incorporated into the supply system Refer to Figure 14 Connect yo...

Страница 33: ...tem before you fill the pump with pump fluid and seal any leaks found outgassing from the fluid may give false test results The pump fluid is viscous at ambient temperatures and may block small leaks The level of leak tightness required will depend on the application of your system You must leak test the system to ensure the integrity of your vacuum system and its vacuum seals A EO2K B EO4K C EO6K...

Страница 34: ... dispose of the materials as described in Section 6 2 Keep eyewash bottles filled with water readily available Use these bottles to immediately flush the eyes if contaminated with pump fluid Minimise exposure to the pump fluid Wear suitable protective clothing such as impervious gloves apron boots and so on Avoid prolonged and repeated contact with pump fluid Do not put on heavily contaminated ite...

Страница 35: ...d BOC Edwards product other fluid Auto ignition temp oC Break down temp oC Thermal breakdown products Type of danger Possible injury Silicone fluids methyl phenyl siloxanes DC702 DC704EU DC705 500 400 Decomposed hydrocarbons and silicon based species Negligible Negligible Alkyl naphthalene fluid Edwards L9 370 300 Naphthalene and decomposed hydrocarbons Naphthalene is poisonous in large quantities...

Страница 36: ...EO2K EO4K and EO6K Diffusion Pumps PAGE 30 Issue G 30 Aug 06 This page intentionally blank ...

Страница 37: ... gases If you do this may result in an explosion or fire The interior of the pump can reach very high temperatures and will remain hot after the pump is switched off until the pump has cooled down If in doubt about the compatibility of gases with the use of the EO pump contact BOC Edwards for advice WARNING Do not operate the pump when the cooling water flow through the cooling coil is restricted ...

Страница 38: ...d use the procedure below to check the insulation resistance of the heater before you reset the RCCB Check the insulation resistance of the heater as follows 1 Measure the insulation resistance at 500 V d c between the heater terminals Figure 13 items 2 and 3 and earth ground Then Multiply the measured resistance by the number of heaters in the pump to calculate the insulation resistance per heate...

Страница 39: ...eaches its operating temperature 7 When the backing pressure is below the critical backing pressure for the pump fluid being used see Table 4 close the backing valve 5 and open the roughing valve 4 8 When the system pressure has fallen to 0 1 mbar 10 Pa or below start fine pumping Close the roughing valve 4 Open the backing valve 5 Open the vacuum system isolation or baffle valve 10 4 4 Readmissio...

Страница 40: ... the pump is in an environment of high ambient humidity we recommend that you maintain the base flange temperature at a temperature between 20 and 30 oC above ambient temperature Ensure that the base flange does not get too hot if it does the pump fluid may vaporise and contaminate the vacuum system For more information about the operation of the pump in high ambient humidity request a copy of our...

Страница 41: ...Figure 15 Typical pumping system configuration 1 Vacuum system 2 Vacuum system air admittance valve 3 High vacuum gauge head 4 Roughing valve 5 Backing valve 6 Backing gauge head 7 Backing pump air admittance valve 8 Backing pump 9 EO pump 10 Vacuum system isolation valve ...

Страница 42: ... not allow the pump to cool before you admit air on re evacuation the pump fluid will superheat and evolve vapour which will pass into the backing pipeline 3 Close the backing valves 4 Open the backing pump air admittance valve 7 and switch off the backing pump 8 Do not switch off the backing pump unless air is admitted to the EO pump otherwise backing pump oil may be drawn into the backing line 5...

Страница 43: ... do not hot water or steam will be ejected from the connections Do not remove the fluid drain plug to vent the EO pump while the pump is operating or under vacuum If necessary get someone to help you move the pump see Section 3 3 3 or use suitable lifting equipment when you move the pump Refer to Section 2 3 for the mass of the EO pump Do not touch or inhale the thermal breakdown products of fluor...

Страница 44: ...elow lists the maintenance operations necessary to maintain the EO pump in normal use Instructions for each operation are given in the section shown More frequent maintenance may be required if the EO pump has been used to process corrosive or abrasive gases and vapours If necessary adjust the maintenance plan according to your experience Operation Frequency Refer to Section Check the pump fluid l...

Страница 45: ...hich is very viscous at normal ambient temperatures switch on the pump heater for a maximum of two minutes to warm the pump fluid to aid draining Do not vaporise the pump fluid 3 Place a suitable container underneath the fluid drain plug see Figure 16 Remove the drain plug and allow the pump fluid to drain into the container 4 Measure the amount of fluid in the container 5 Refit the drain plug 6 R...

Страница 46: ...uit the type of pump fluid that has been used 5 6 2 Dismantle the pump 1 Switch off the EO pump allow it to cool and open it to atmospheric pressure 2 If the pump fluid is too cold to be drained from the pump switch on the pump heater for a maximum of two minutes to warm the pump fluid to aid draining Do not vaporise the pump fluid 3 Place a suitable container underneath the fluid drain plug see F...

Страница 47: ...spring top jet cap and interior jet assembly use the method described in steps 3 and 4 above 7 Inspect all of the O rings and Co Seals replace any that are damaged or that have deteriorated or have undergone thermal set 8 Use dry lint free cloth or paper to clean the undamaged O rings and Co Seals Ensure that all O rings and Co Seals are dust free before reassembly 9 Check that all sealing surface...

Страница 48: ...eld and remove the shield 4 Clean the interior of the shield then refit the shield 5 8 Replace the pump heater Note When you replace the heater we recommend that you check the fluid charge and the condition of the pump fluid refer to Sections 5 4 and 5 5 5 8 1 Remove the old heater 1 Switch off the EO pump and allow it to cool Isolate the pump from the electrical supply 2 If there is insufficient ...

Страница 49: ... supply cable to the pump 8 Check the heater circuits for any abnormal earth ground leakage due to insulation breakdown 9 Check that the earth ground strap is properly earthed grounded and secured to the terminal box 10 Refit and secure the terminal box cover 5 9 Check the heater securing nut If the pump is regularly heated up and cooled down you must regularly check that the heater securing nut i...

Страница 50: ...ck the cooling water pressure and temperature and correct if necessary Check the cooling water pipelines for obstructions and back pressure and correct as necessary Is the air cooling inadequate Check that the cooling fan works Rectify any problem found Check that the air flow to the cooling fan is not obstructed Remove any obstructions Check that the ambient temperature of the air supply to the c...

Страница 51: ... pump fluid Refill with new fluid if necessary Is there a leak in the vacuum system ahead of the EO inlet Check and seal any leak found Is there a trapped volume in the vacuum system Check and rectify if necessary Have O ring seals been excessively lubricated Check and rectify if necessary Is there an excessive fluid charge in the EO pump Check the level of fluid in the pump Drain the fluid if nec...

Страница 52: ...EO2K EO4K and EO6K Diffusion Pumps PAGE 46 Issue G 46 Aug 06 This page intentionally blank ...

Страница 53: ...When required prepare and install the pump as described in Section 3 6 2 Disposal Dispose of the EO pump and any components removed from it safely in accordance with all local and national safety and environmental requirements Take particular care with the following Components which have come into contact with pump fluid Fluoroelastomers which may have been subjected to temperatures above 315 oC s...

Страница 54: ...EO2K EO4K and EO6K Diffusion Pumps PAGE 48 Issue G 48 Aug 06 This page intentionally blank ...

Страница 55: ... wide network of BOC Edwards Service Centres Each Service Centre offers a wide range of options including equipment decontamination service exchange repair rebuild and testing to factory specifications Equipment which has been serviced repaired or rebuilt is returned with a full warranty Your local Service Centre can also provide BOC Edwards engineers to support on site maintenance service or repa...

Страница 56: ...ber Heaters 0 85 kW 110 125 V H017 00 140 0 85 kW 210 225 V H017 00 134 0 85 kW 230 250 V H017 00 137 Pump inlet Co Seal ISO160 fluoroelastomer B271 58 074 Backing connection NW25 O ring and centring ring nitrile C105 14 393 Backing connection NW25 O ring nitrile pack of 10 H021 24 015 Drain plug O ring VIT2A pack of 5 H021 06 115 Table 18 EO4K pump spares Spare Item Number Heaters 0 35 kW 110 125...

Страница 57: ...p switch B023 02 000 Table 20 EO2K pump accessories Accessory Item Number QSB160 manually operated valve B428 02 000 QSB160P pneumatically operated valve B428 03 000 160 mm rotatable flange pack C100 11 010 Cooling fail thermal snap switch B023 02 000 Pump ready thermal snap switch B023 04 000 Table 21 EO4K pump accessories Accessory Item Number QSB250 manually operated valve B430 02 000 QSB250P p...

Страница 58: ...EO2K EO4K and EO6K Diffusion Pumps PAGE 52 Issue G 52 Aug 06 This page intentionally blank ...

Страница 59: ... hazardous materials Note Some contaminated equipment may not be suitable for airfreight PROCEDURE 1 Contact BOC Edwards and obtain a Return Authorisation Number for your equipment 2 Complete the Return of BOC Edwards Equipment Declaration HS2 3 If the equipment is contaminated you must contact your transporter to ensure that you properly classify the hazard mark manifest and ship the equipment in...

Страница 60: ...proof of decontamination YOU MUST CONTACT BOC EDWARDS FOR ADVICE BEFORE YOU RETURN SUCH EQUIPMENT Print your name _________________________________Print your job title _________________________ Print your organisation ____________________________________________________________________ Print your address _______________________________________________________________________ ______________________...

Страница 61: ...This page intentionally blank ...

Страница 62: ...OC EDWARDS Ammerthalstraße 36 85551 Kirchheim Munich Tel 49 89 99 19 18 0 Fax 49 89 99 19 18 99 HONG KONG S A R BOC EDWARDS ASIA 12 Chun Yat Street Tseung Kwan O Industrial Estate Tseung Kwan O Kowloon Hong Kong S A R Tel 852 2372 2640 Fax 852 2796 9095 INDIA BOC EDWARDS DIVIN OF BOC INDIA LIMITED 203 Surya Kiran Building 19 Kasturba Gandhi Marg New Delhi 110 001 India Tel 91 11 851 0065 Fax 91 11...

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