BOC Edwards EO2K, Инструкция по эксплуатации

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EO2K, EO4K and EO6K Diffusion Pumps
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Issue G 41 Aug 06
4. Dispose of the fluid drained from the pump: refer to Section 6.2.
5. Disconnect the EO pump from the electrical supply and detach it from your vacuum system.
6. Remove the inlet-flange Co-Seal or ‘O’ ring, as appropriate.
7. Remove the backing-connection ‘O’ ring seal.
8. Remove the guard-ring:
• EO2K - loosen the retaining screw on the guard-ring then lift off the guard-ring.
• EO4K/EO6K - loosen the adjuster screw(s) then lift off the guard-ring.
9. Remove the top-jet cap and retaining spring, then remove the remaining interior jet assembly from
the pump.
5.6.3 Clean the pump components
1. Wash the exterior of the pump-body, backing tube and condenser with the selected cleaning
solution.
2. Remove the radiation shield: refer to Section 5.7.
3. Remove the heater assembly: refer to Section 5.8.1.
4. Immerse the pump-body in a vapour degreasing bath. If a vapour degreasing bath of sufficient size
is not available, wash the interior of the pump-body with the cleaning solution.
5. Pass warm air over the components and the pump interior to remove all traces of the cleaning
solution.
6. Clean the guard-ring, spring, top-jet cap and interior jet assembly: use the method described in
steps 3 and 4 above.
7. Inspect all of the ‘O’ rings and Co-Seals; replace any that are damaged or that have deteriorated or
have undergone thermal set.
8. Use dry, lint-free cloth or paper to clean the undamaged ‘O’ rings and Co-Seals. Ensure that all ‘O’
rings and Co-Seals are dust-free before reassembly.
9. Check that all sealing surfaces are scratch-free. Refinish surfaces that are scratched.
10. Dispose of used cleaning solution and cleaning materials: refer to Section 6.2.
5.6.4 Reassemble the pump
1. Carefully insert the interior jet assembly in the pump-body; locate the slot at the bottom of the
interior assembly over the lug in the base of the pump-body to ensure the ejector jet aligns with
the backing tube.
2. Assemble the top-jet cap and the retaining spring. Fit the guard-ring and position it on the jet-cap.
The centring pin in the top-jet cap must be flush with the guard-ring cap.
3. Ensure the guard-ring is positioned centrally over the top-jet cap, then carefully tighten the retaining
screw (on the EO2K) or the adjuster screws (on the EO4K/EO6K) to secure the guard-ring. Do
not over-tighten the screws.
4. Refit the fluid drain-plug.
(Continued on page 42)
CAUTION
Do not use abrasive or reactive chemicals to clean pump components. If you do, the performance of
the pump may be impaired.