BOC Edwards EO2K, Инструкция по эксплуатации

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EO2K, EO4K and EO6K Diffusion Pumps
TECHNIC
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PAGE
9
Issue G 9 Aug 06
2 TECHNICAL DATA
2.1 Operating and storage conditions
2.2 Performance
Note: As specified in Section 1.4, pump performance depends on a number of factors.
Typical surface temperature during operation > 200
o
C
Maximum surface temperature during operation
250
o
C (pump body), 400
o
C (pump base)
Table 1 – Operating and storage conditions
Maximum system pressure
300 mbar gauge, 1.3 bar absolute, 1.3 x 10
5
Pa
Ultimate vacuum
With DC702 fluid
5 x 10
-6
mbar, 5 x 10
-4
Pa
With DC704EU fluid
5 x 10
-7
mbar, 5 x 10
-5
Pa
With DC705 fluid
5 x 10
-7
mbar, 5 x 10
-5
Pa
With Santovac 5 fluid
5 x 10
-7
mbar, 5 x 10
-5
Pa
With Edwards L9 fluid
5 x 10
-7
mbar, 5 x 10
-5
Pa
Minimum backing pump displacement
*
* For maximum throughput.
EO2K
5 m
3
h
-1
EO4K
6.6 m
3
h
-1
EO6K
12 m
3
h
-1
Recommended backing pumps
EO2K
RV5/RV3
§
§ Use an RV3 backing-pump if maximum throughput is not required.
EO4K
RV8/RV12
‡
‡ Use an RV12 backing-pump for very fast roughing.
EO6K
E2M12/E2M28
†
† Use an E2M28 backing-pump for very fast roughing.
EO2K pumping speed
Air (see Figure 5)
ISO 150 l s
-1
, AVS 170 l s
-
Hydrogen
ISO 200 l s
-1
EO4K pumping speed
Air (see Figure 6)
ISO 600 l s
-1
, AVS 680 l s
-
Hydrogen
ISO 800 l s
-1
EO6K pumping speed
Air (see Figure 7)
ISO 1350 l s
-1
, AVS 1500 l s
-
Hydrogen
ISO 2000 l s
-1
Table 2 – Performance data