G 01039 - Edition 08 - December 06
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ADP/ADS Series Two dry pump range
The pump manufacturer has developed a range of dry pumps
adapted to the different processes used in the semi-conductor industry.
The range includes:
ADP122, which is available in two versions:
ADP 122 P
: integrated in a covered frame including: the pump,
the monitoring, the hand-held remote control, facilities, the
flowmeter panel, the OEM interface, the serial link.
ADP 122 LM
: simplified model with monitoring designed for clean
processes (load-lock and transfer chamber pumping).
Five pumping groups composed of an ADP122 combined with
a Roots to make a fully integrated system:
ADS 602 H
,
ADS 602 P
,
ADS 602 LM, ADS 1202 H
and
ADS 1202 P
for semi-conductors processes.
Two high volume pumping groups ADS 1802.
They are composed of a A300 primary dry pump with a
RSV 1802W Roots blower fitted to the inlet of the dry pump.
The A300 dry pump is a five stage Roots type pump similar to
ADP 122 pump, the RSV 1802W booster is a Roots blower type
pump similar to RSV 1002P blower used in ADS 1202 P system.
They are available in two versions:
ADS 1802 P
for medium processes in the semi-conductor.
ADS 1802 H
for harsh processes (anti-corrosive materials,
possibility to increase purge flowrate). It includes a built-in
dual cooling system.
H models are optimized for harsh processes (anti-corrosive materials,
possibility to increase purge flowrate). Beside they are equipped with
exhaust pipe heater device which reduces deposits when pumping
condensable gases.
Model’s description
Monitoring
Purge
Thermo-controlled
Applications
ADP 122 LM - ADS 602 LM
M4
No
No
Clean processes
ADP 122 P - ADS 602 P
ADS 1202 P - ADS 1802 P
M4
Yes
Yes
Medium processes
ADS 602 H
ADS 1202 H - ADS 1802 H
M4
Yes
Yes
Harsh processes
adixen Vacuum Products - Operating instructions - ADP/ADS Series Two
