Veeco Dimension 3100, Manual

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Calibration
Fine-tuning for X-Y Calibration
Rev. D Dimension 3100 Manual 329
17.7.4 Measure Horizontally at 150 V Scan Size
1. Verify that the Scan angle is set to 0.00 degrees, and that Units ( Other Controls panel) is
set to Volts .
2. Set the Scan size parameter on the Scan Controls panel to one-third the maximum ( 150V ).
3. Select two widely-spaced features on the sample image of known separation, then use the
mouse to draw a horizontal line between them.
Note: For example, on a 10µm, silicon reference, draw the line from the left side of
one pit to the left side of another pit as far away as possible. The microscope
displays the measured distance next to the line.
4. Verify that the microscope’s measured distance agrees with the known horizontal distance.
5. If there is significant disagreement between the two, fine-tuning is required; go to the next
step. If the displayed distance agrees with the known distance, skip to Section 17.7.5 .
6. Perform fine-tuning adjustments using either trial and error or calculate the precise
correction (see Calculation Method ).
Trial and Error Method
1. Select the Realtime > Microscope > Calibrate > Scanner function to display the Scanner
Calibration dialog box.
2. Select the X fast derate parameter or Y slow derate for Y-axis adjustment.
3. If the measured distance is less than the actual distance, decrease the X fast derate parameter
slightly or Y slow derate for Y-axis adjustment and re-measure image features.
4. Adjust deratings up or down until measurements accord with known feature distances.
Calculation Method
1. Select Realtime > Microscope > Calibrate > Scanner to display the Scanner Calibration
dialog box.
2. Record the X fast derate or Y slow derate value.
3. Perform the following calculation where s is the X fast sens or Y slow sens value; a is the
actual distance; d is the X fast derate or Y slow derate value you recorded in the above step;
m is the measured distance; and, v is the Scan size in volts:
s
a
m
----
s d 440 v –
( )
–
[ ] ⋅
 
 
–
440 v –
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