Veeco Dimension 3100, Manual

Page: 339 / 376

Calibration
Linearity Correction
Rev. D Dimension 3100 Manual 319
Adjusting Slow arg
1. Follow the same instructions for Fast arg .
2. Adjust the zoom box to fit the beginning and ending of the scan, then check the center.
3. If the features in the center are too large, reduce the Slow arg value. If the features in the
center are too small, increase the Slow arg value.
4. After adjusting Slow arg values, check if Slow mag0 requires readjusting.
5. Repeat the procedure for adjusting Slow mag0 until the rulings are evenly spaced along the
slow axis.
17.4.2 Adjust Fast mag1
Initial Adjustment
1. For initial adjustment, click
OK
to close the Scanner Calibration window.
Note: Selecting Cancel resets parameters to default values when the box is opened.
2. Change the Scan size to 150V .
3. Select View > Scope Mode .
4. On the display monitor, select Dual Trace . If the two scope traces do not overlap, Fast mag1
needs adjusting.
5. On the Scan Controls panel, select Slow scan axis . When tall features appear on the scope
trace, press the keyboard right or left arrow key to switch the Slow scan axis to Disabled .
6. Select Microscope > Calibrate > Scanner to open the Scanner Calibration box.
7. Select Fast mag1 .
8. Use the left and right arrow keys to change the value until the two traces align.
Note: The yellow retrace line will shift in the same direction as the arrow.
9. When done, click
OK
to close the Scanner Calibration window.
10. Set Slow scan axi s back to Enabled .
11. Select View > Image Mode .