Calibration
Calibration Setup
Rev. D
Dimension 3100 Manual
313
17.2.2 Align Calibration Reference
1. Load the silicon calibration reference into the SPM.
2. Align the reference with the microscope scanner so that the tip scans parallel to the
reference’s features with the
Scan angle
set at
0
degrees (see
).
Figure 17.2a
0 Degrees Scan Angle
3. Align the reference within approximately 2º of perpendicularity to the scan axes.
17.2.3 Set Realtime Parameters
1. Set parameters in the control panels to the following values:
Panel
Parameter
Setting
Scan Controls
Scan Size
440 V
X offset
0.00 nm
Y offset
0.00 nm
Scan angle
0.00 deg
Scan rate
2.44 Hz
Number of samples
256
Slow scan axis
Enabled
Z limit
440 V
Other Controls
Units
Volts
Channel 1
Data type
Height
Z range
~ 20 V
a
a. Adjust the
Z range
parameter to obtain the best contrast.
Scan Angle = 0°
Summary of Contents for Dimension 3100
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