Veeco Dimension 3100, Manual

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Safety
Power-up Sequence (Installation and Service Only)
28 Dimension 3100 Manual Rev. D
2.6.1 Pre Power-up Checklist
Pre-Installation
_______ 1. Verify that there is a minimum installation space of 10' (-305 cm) wide x 7.5' (–230cm) deep.
Note: Refer to Chapter 3 for facilities requirements specific to the various Dimension
3100 configurations.
_______ 2. Verify that AC power (100V, 120V, 220V-240V single phase) is available to the system.
_______ 3. Verify the power disconnection device is easily located.
_______ 4. Verify that clean dry air is available at 60-100 psi to the vibration isolation table.
_______ 5. Verify that vacuum is available at
≥
24" Hg to the system (IS3K-2 acoustic hood only). A vacuum
pump is integrated into the Dimension 3100 controller for use with enclosures other than the
IS3K-2.
Module Installation
_______ 1. Uncrate the Dimension 3100 SPM system components.
_______ 2. Verify all facilities requirements outlined in Chapter 3 are met.
_______ 3. Install the Dimension 3100 SPM by completing the following:
______ Set the vibration isolation table or microscope platform in place.
______ Transition the Dimension 3100 SPM to the final operating location.
______ Secure the chuck base and stage.
CAUTION: You must complete the pre power-up checklist before proceeding
with facilities connections and the power-up procedure.
ATTENTION: Vous devez effectuer une checklist pour vérifier la mise sous
tension avant de mettre en place les connections et commencer la
procédure de mise sous tension.
VORSICHT: Gehen Sie durch die folgende Checkliste („Pre-Power-up
Checklist”), bevor Sie Verbindungen zum Netzanschluß und zu den
Versorgungsleitungen herstellen und das System einschalten.