Veeco Dimension 3100, Manual

Page: 335 / 376

Calibration
Check Sample Orthogonality
Rev. D Dimension 3100 Manual 315
Note: In Figure 17.3a , pits align with the vertical (slow) axis but skew with the
horizontal (fast) axis. The angle should be measured with the vertex near the
center of the image and the vertices in the upper-right or lower-left quadrant.
The angle displays on the white status bar at the bottom of the display monitor.
3. Use the mouse to drag the cursor until it is oriented correctly then read the angle off the status
bar. If the angle differs by more than a half degree, a correction is required; otherwise, move
on to the next step.
17.3.2 Adjust Sample Orthogonality
1. Click Realtime > Microscope > Calibrate > Scanner to access the Scanner Calibration
panel. The Orthogonality parameter is displayed on the bottom-right corner of the panel.
2. Enter the difference between 90º and the angle measured in the Top View image.
Note: For example, if the angle measured in the Top View image was 92.5º, enter a
value of -2.5 º in the Orthogonality parameter.
3. Click
OK
to exit the Scanner Calibration panel
4. Capture another image and re-measure the angle.
5. Repeat correction of Orthogonality until the scanned image shows less than 0.5º of error.
Note: After a major change to the orthogonality parameter, you may need to
physically realign the calibration standard to the image frame.